Pregled bibliografske jedinice broj: 187634
Performance of the 13.5 nm PVC capillary discharge EUV source
Performance of the 13.5 nm PVC capillary discharge EUV source // Physics letters. A, 335 (2005), 5-6; 430-434 (međunarodna recenzija, članak, znanstveni)
CROSBI ID: 187634 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Performance of the 13.5 nm PVC capillary discharge EUV source
Autori
Andreić, Željko ; Ellwi, Samir Shakir ; Pleslić, Sanda ; Kunze, Hans-Joachim
Izvornik
Physics letters. A (0375-9601) 335
(2005), 5-6;
430-434
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
EUV sources; Ablative capillary discharge
Sažetak
A complete description of an ablative capillary discharge source emitting narrow band radiation at 13.5 nm is presented. The device is based on capillaries made of PVC with traces of Sn in the chemical additives used in the PVC production process. The strong emission is centered at 13.5 nm with a FWHM of 0.6 nm. The device is further characterized by a high conversion efficiency (0.45% at present and scalable above 2% with higher Sn concentration), low out-of-band XUV radiation and low divergence of the radiation cone (approximately +/- 20 mrad). By optimizing discharge parameters and capillary construction, the capillary lifetime is considerably extended, and is currently more that 300 shots on the average.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
POVEZANOST RADA
Ustanove:
Fakultet elektrotehnike i računarstva, Zagreb,
Rudarsko-geološko-naftni fakultet, Zagreb
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
