Naslov
Ablative capillary discharge as a source of extreme ultraviolet radiation

Autori
Pleslić, Sanda

Vrsta, podvrsta i kategorija rada
Ocjenski radovi, doktorska disertacija

Fakultet
Prirodoslovno-matematički fakultet

Mjesto
Zagreb

Datum
18.01

Godina
2005

Stranica
117

Mentor
Andreić, Željko

Ključne riječi
ablative capillary discharge; EUV source of radiation

Sažetak
Ablative capillary discharges based on PVC with additives of tin, zinc and soot, and on polyacetal (CH2O)n were investigated. In PVC with additives of Sn and Zn, band radiation with a full-width at half-maximum of around 1 nm and maxima near 10, 13.5 and 15.5 nm was observed. The 13.5 nm band (PVC with Sn) was not very sensitive to input discharge voltage and gave optimal discharge at 12 kV, but the 10 and 15.5 nm bands (from PVC with Zn) could be controlled by discharge voltage. The integrated intensity of the band around 13.5 nm for PVC with Sn accounted for about 90% of the total EUV radiation output of the capillary what was identified as a complex structure produced by overlapping of many individual Sn-lines (from Sn VIII to Sn XIII). Discharge currents were of order of magnitude of kA, discharge cycle periods were of order of magnitude of 100 ns, and total inductances were of order of magnitude of nH. The energy of one pulse in 13.5 nm band was (3.00 +/- 0.01) mJ per one shot, the radiation density was (0.48&plusmn ; ; 0.01) mJ/sr and the half-width of the beam was (60 +/- 10) mrad. The total radiation intensity in band was one order of magnitude higher than the intensity of other sources based on gas discharges for xenon and for krypton. A low concentration of Sn in PVC ((0.37 +/- 0.04)%) and good thermalisation of the capillary plasma produced well-defined radiation bands with little line radiation outside the band of interest. Electron temperatures about 15-20 eV and densities of the order of magnitude of 10E18-10E19 cm-3 at maximum were obtained. It was shown that PVC with Sn could successfully be used as material for ablative capillaries if the discharge is operated at reduced current and the triggering circuit is appropriately modified to eliminate problems with carbon-reach debris.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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