Naslov
Diffusion and phase formation during annealing of Al/Cu/Fe thin films

Autori
Čekada, Miha ; Panjan, Peter ; Dolinšek, J. ; Medunić, Zvonko ; Jakšić, Milko ; Radić, Nikola

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
IVC-16 (16th Internationa Vacuum Congress), ICSS-12 (12 International Conference on Solid Surfaces) NANO-8 (8th Int. Conference on Nanometer Scale Science and Technology) AIV-17 (17th Vacuum INternational Symposium Book 1: Plenary and Parallel Sessions) / Sancrotti, Massimo - Venecija : IUVSTA & Associazione Italiana del Vuoto, 2004, 208-208

Skup
IVC-16 (16th INternationa Vacuum Congress), ICSS-12 (12 International Conference on Solid Surfaces) NANO-8 (8th Int. Conference on Nanometer Scale Science and Technology) AIV-17 (17th Vacuum INternational Symposium)

Mjesto i datum
Venecija, Italija, 28.06.2004. - 02.07.2004

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
Al/Cu/Fe thin films; phase formation

Sažetak
The Al-Cu-Fe system is interesting due to the existence of the quasicrystalline phase Al62.5Cu25Fe12.5 as well as its approximant phases. One of possible ways to deposit such structures in thin film form is composed of two steps: to deposit a multilayer structure of individual elements and consequently anneal it in order to homogenize the film. Proper understanding of the diffusion patterns is essential. For this purpose several bilayers and trilayers of individual elements were deposited by sputtering with a total thickness of about 400 nm. Afterwards, the samples were annealed in tube furnace in inert atmosphere. Rutherford backscattering spetrometry (RBS) and Auger electron spectrometry (AES) were used to quantify the depth profiles. Individual phases were identified by X-ray diffraction (XRD). The results point out to a two-stage process as a function of rising temperature: first Al and Cu form a compound layer, later to incorporate iron as well. Various methods of concentration maesurement are also discussed (RBS, EDS, mass and thickness of layers).

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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