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Pregled bibliografske jedinice broj: 160207

Control of a MEMS Optical Switch


Borovic, Bruno; Hong, Cai; Liu, Ai Qun; Xie, Lihua; Lewis, Frank L.
Control of a MEMS Optical Switch // The 43rd IEEE Conference on Decision and Control, CDC 2004
Nassau, Bahami, 2004. (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)


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Naslov
Control of a MEMS Optical Switch

Autori
Borovic, Bruno ; Hong, Cai ; Liu, Ai Qun ; Xie, Lihua ; Lewis, Frank L.

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
The 43rd IEEE Conference on Decision and Control, CDC 2004 / - , 2004

Skup
The 43rd IEEE Conference on Decision and Control, CDC 2004

Mjesto i datum
Nassau, Bahami, 14.12.2004. - 17.12.2004

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
MEMS; optical switch; modeling; control; electrostatic actuator

Sažetak
An analysis is performed of a MEMS optical switch to determine a dynamical model containing electrical, mechanical, and optical components. The model is compared to experimental results and shows a good match, aside from the damping term which is difficult to analyze. Improved parameters are determined by system identification from the actual experimental data. The improved model is used to design a controller that has two parts, a feedforward part and a feedback part. The feedforward portion, not normalized in MEMS control, is shown to be instrumental in obtaining fast optical switching with minimal overshoot.

Izvorni jezik
Engleski

Znanstvena područja
Elektrotehnika



POVEZANOST RADA


Projekti:
0036010


Citiraj ovu publikaciju:

Borovic, Bruno; Hong, Cai; Liu, Ai Qun; Xie, Lihua; Lewis, Frank L.
Control of a MEMS Optical Switch // The 43rd IEEE Conference on Decision and Control, CDC 2004
Nassau, Bahami, 2004. (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
Borovic, B., Hong, C., Liu, A., Xie, L. & Lewis, F. (2004) Control of a MEMS Optical Switch. U: The 43rd IEEE Conference on Decision and Control, CDC 2004.
@article{article, author = {Borovic, Bruno and Hong, Cai and Liu, Ai Qun and Xie, Lihua and Lewis, Frank L.}, year = {2004}, keywords = {MEMS, optical switch, modeling, control, electrostatic actuator}, title = {Control of a MEMS Optical Switch}, keyword = {MEMS, optical switch, modeling, control, electrostatic actuator}, publisherplace = {Nassau, Bahami} }
@article{article, author = {Borovic, Bruno and Hong, Cai and Liu, Ai Qun and Xie, Lihua and Lewis, Frank L.}, year = {2004}, keywords = {MEMS, optical switch, modeling, control, electrostatic actuator}, title = {Control of a MEMS Optical Switch}, keyword = {MEMS, optical switch, modeling, control, electrostatic actuator}, publisherplace = {Nassau, Bahami} }




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