Pregled bibliografske jedinice broj: 15998
Polyslicon Temperature Sensor
Polyslicon Temperature Sensor // Proceedings of MELECON ´98, Vol. I / Baal-Schem, Jacob (ur.).
Tel Aviv: Institute of Electrical and Electronics Engineers (IEEE), 1998. str. 362-366 (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
CROSBI ID: 15998 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Polyslicon Temperature Sensor
Autori
Bendeković, Zdravko ; Biljanović, Petar ; Grgec, Dalibor
Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni
Izvornik
Proceedings of MELECON ´98, Vol. I
/ Baal-Schem, Jacob - Tel Aviv : Institute of Electrical and Electronics Engineers (IEEE), 1998, 362-366
Skup
MELECON ´98 - 9th Mediterranean Electrotechnical Conference
Mjesto i datum
Tel Aviv, Izrael, 18.05.1998. - 20.05.1998
Vrsta sudjelovanja
Predavanje
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
polysilicon; temperature sensor; conduction model; electrical resistance; samples processing
Sažetak
Temperature dependence of polysilicon electrical resistance is investigated using existing polysilicon electrical conduction models. Conducted simulations showed the possibility of producing polysilicon resistors having a stable resistance on temperature dependence. A new polysilicon temperature sensor structure is proposed and processed according to optimal specifications. Measurements conducted on the processed samples showed that they have an almost linear resistance vs. temperature characteristic in a wide temperature range from 200 to 800 K.
Izvorni jezik
Engleski
Znanstvena područja
Elektrotehnika
