Naslov
EUV band radiation of ablative capillary discharges in PVC capillaries

Autori
Andreić, Željko ; Ellwi, Samir ; Pleslić, Sanda ; Kunze, Hans-Joachim

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Skup
9th Joint Vacuum Conference

Mjesto i datum
Leibnitz, Austrija, 16.06.2002. - 20.06.2002

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
EUV source; Ablative capillary discharge; 13.5 nm source

Sažetak
A systematic study of the performance of an ablative capillary discharge through a PVC capillary is reported. It is shown that the PVC capillary is capable of producing strong band of EUV radiation at or near the technologically very interesting wavelength of 13.5 nm. This band of radiation is produced by transition arrays of multiply ionized heavy metal ions (Sn, Zn, etc.) that are constituents of various chemical additives in commercial PVC grades. A low concentration of radiating ions, good thermalization of the capillary plasma and plasma homogeneity along the capillary axis produce well defined bands with little line radiation outside the band of interest. Two interesting cases are discussed, both producing band radiation with a full-width at half-maximum of around 1 nm and maxima near 10 and 13.5 nm, respectively. Both are capable of producing several mJ/sr/pulse of radiation in the respective radiation band. The plasma spectra are not very sensitive to input discharge voltage, but in some cases the amount of energy in the band of interest can be controlled by it. The most serious problem of such discharges still remains the amount of macroscopic debris produced by the capillary ablation.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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