Naslov
Medium range ordering of amorphous silicon-carbon alloys studied by GISAXS, optical spectroscopy and IBA

Autori
Gracin, Davor ; Jakšić, Milko ; Dubček, Pavo ; Zorc, Hrvoje ; Juraić, Krunoslav

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
Abstracts of 8th European Vacuum Congress / ? - Berlin : Deutsche Vakuumgesellschaft, 2003, 86-86

Skup
8th European Vacuum Congress

Mjesto i datum
Njemačka, 23.06.2003. - 26.06.2003

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
amorphous silicon carbide; nano-structure; GISAXS; RBS; ERDA; FTIR

Sažetak
The nano-structural properties of non-stehiometric hydrogenated amorphous silicon carbide thin films, deposited by magnetron sputtering and PECVD (Plasma Enhanced Chemical Vapour Deposition) in a wide range of hydrogen and carbon concentration, were analysed by GISAXS (Grazing Incidence Small Angle X-ray Scattering), optical spectroscopy and IBA (Ion Beam Analysis). The GISAXS was performed on ELETTRA synchrotron radiation source, Trieste (Italy). All of the measured specimens showed the presence of "particles" with mean dimensions between 1.5 and 4, 5 nm while the size distribution of "particles" varied from sample to sample between 1 and 2.5 nm. In order to determine the constitution of the "particles", the specimens were examined by vibrational spectroscopy (Raman and IR spectroscopy) when estimating the local structural and chemical ordering and IBA (Ion Beam Analysis) e.g. RBS (Rutherford Back Scattering) and ERDA (Elastic Recoil Detection Analysis) when estimating the composition of films. The results suggest that the "particles" are agglomerates of small voids, whose size increases with carbon to silicon ratio and whose distribution broadens with hydrogen concentration.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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