Pregled bibliografske jedinice broj: 1107162
Radiation Pressure Sensor
Radiation Pressure Sensor // Proceedings of 43rd International Convention on Information, Communication and Electronic Technology (MIPRO) / Skala, Karolj (ur.).
Rijeka: Hrvatska udruga za informacijsku i komunikacijsku tehnologiju, elektroniku i mikroelektroniku - MIPRO, 2020. 978-1-7281-5339-1, 4 doi:10.23919/mipro48935.2020.9245357 (poster, međunarodna recenzija, sažetak, znanstveni)
CROSBI ID: 1107162 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Radiation Pressure Sensor
Autori
Karuza, Marin ; Božičević, Dorotea ; Cantatore, Giovanni ; Vretenar, Mario
Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni
Izvornik
Proceedings of 43rd International Convention on Information, Communication and Electronic Technology (MIPRO)
/ Skala, Karolj - Rijeka : Hrvatska udruga za informacijsku i komunikacijsku tehnologiju, elektroniku i mikroelektroniku - MIPRO, 2020
ISBN
978-953-233-099-1
Skup
43nd International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO 2020)
Mjesto i datum
Opatija, Hrvatska, 28.09.2020. - 02.10.2020
Vrsta sudjelovanja
Poster
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
homodyne detection ; membrane brownian motion
Sažetak
Mechanical elements with dimensions in the nanometer range, at least in one direction, have been successfully employed as sensors in various devices. Their mechanical properties must be known with maximum precision in order to quantify the sensor response to external excitation. This often poses a significant challenge due to the mechanical fragility of the sensor elements. Here we present a measurement of the mechanical response of a 100 nm thick silicon nitride membrane. The external excitation force is provided by a laser beam modulated in amplitude, while the displacement of the membrane is measured by a Michelson interferometer with a homodyne readout.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
