Naslov
Friction compensation in ultrahigh-precision positioning

Autori
Kamenar, Ervin ; Zelenika, Saša ; Perčić, Marko

Izvornik
Engineering power : bulletin of the Croatian Academy of Engineering (1331-7210) 15 (2020), 4; 2-7

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, pregledni rad, znanstveni

Ključne riječi
friction compensation ; ultrahigh-precision ; precision engineering ; microsystem technologies ; control algorithms

Sažetak
Ultrahigh-precision positioning devices are essential in precision engineering and microsystems’ technologies. As they need to allow sub-micrometric or even nanometric displacements, their nonlinear frictional behaviour, induced by a number of sliding and rolling components, has to be efficiently compensated for. If a model- based approach is followed, suitable modelling of such disturbances, which is generally performed using state-of the art friction models, has to be performed. An overview of different compensation and control algorithms applied to ultrahigh- precision positioning systems is hence given in this work.

Izvorni jezik
Engleski

Znanstvena područja
Strojarstvo, Temeljne tehničke znanosti, Interdisciplinarne tehničke znanosti

POVEZANOST RADA