Pregled bibliografske jedinice broj: 1028707
Limits on thinning of boron layers with/without metal contacting in PureB Si (photo)diodes
Limits on thinning of boron layers with/without metal contacting in PureB Si (photo)diodes // IEEE electron device letters, 40 (2019), 6; 858-861 doi:10.1109/led.2019.2910465 (međunarodna recenzija, članak, znanstveni)
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Naslov
Limits on thinning of boron layers with/without metal contacting in PureB Si (photo)diodes
Autori
Knežević, Tihomir ; Liu, Xingyu ; Hardeveld, Erwin ; Suligoj, Tomislav ; Nanver, Lis K.
Izvornik
IEEE electron device letters (0741-3106) 40
(2019), 6;
858-861
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
chemical-vapor deposition ; electron injection ; monolayer ; photodiodes ; pure boron ; silicon ; ultrashallow junction
Sažetak
A little more than a monolayer-thick pure-boron (PureB) layer was deposited on silicon at 250 °C by chemical vapor deposition (CVD), forming junctions with low saturation current. They displayed the same efficient suppression of electron injection as PureB diodes fabricated with a few nm-thick PureB layer deposited at 400 °C. Assuming high concentrations of acceptor states at the B-to-Si interface, induced by a fixed negative charge in the range from 5 × 10 13 cm -2 to 5 × 10 14 cm -2 , would be consistent with the experiments and device simulations that exhibit an efficient suppression of electron injection. Metallization of the B-layers was studied, showing that in many situations, thinning of the layer to monolayer thickness will lead to a significant increase in the electron injection.
Izvorni jezik
Engleski
Znanstvena područja
Fizika, Interdisciplinarne prirodne znanosti, Elektrotehnika
POVEZANOST RADA
Projekti:
HRZZ-IP-2018-01-5296 - Nova generacija poluvodičkih elemenata i integriranih sklopova za eru Interneta stvari (NexGenSemi) (Suligoj, Tomislav, HRZZ ) ( CroRIS)
Ustanove:
Fakultet elektrotehnike i računarstva, Zagreb
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus