Pregled bibliografske jedinice broj: 947032
Evaluation of defect density by top-view large scale AFM on metamorphic structures grown by MOVPE
Evaluation of defect density by top-view large scale AFM on metamorphic structures grown by MOVPE // Applied surface science, 349 (2015), 849-854 doi:10.1016/j.apsusc.2015.05.070 (međunarodna recenzija, članak, znanstveni)
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Naslov
Evaluation of defect density by top-view large scale AFM on metamorphic structures grown by MOVPE
Autori
Gocalinska, Agnieszka ; Manganaro, Marina ; Dimastrodonato, Valeria ; Pelucchi, Emanuele
Izvornik
Applied surface science (0169-4332) 349
(2015);
849-854
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
Metalorganic vapor phase epitaxy ; Atomic force microscopy ; Defects ; Arsenates ; Semiconducting III-V materials
Sažetak
We demonstrate an atomic force microscopy based method for estimation of defect density by identification of threading dislocations on a non-flat surface resulting from metamorphic growth. The discussed technique can be applied as an everyday evaluation tool for the quality of epitaxial structures and allow for cost reduction, as it lessens the amount of the transmission electron microscopy analysis required at the early stages of projects. Metamorphic structures with low surface defectivities (below 10(6)) were developed successfully with the application of the technique, proving its usefulness in process optimisation. (C) 2015 Elsevier B.V. All rights reserved.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
