Naslov
Characterisation of grains in tungsten-carbon films

Autori
Dubček, Pavo ; Radić, Nikola ; Milat, Ognjen

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
SYMPOSIUM I Synchrotron Radiation and Materials Science / Amenitsch, Heinz - Strasbourg : European Materials Research Society, 2002

Skup
European Material Research Society (E-MRS), Spring Meeting 2002

Mjesto i datum
Strasbourg, Francuska, 16.06.2002. - 22.06.2002

Vrsta sudjelovanja
Poster

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
GISAXS; SAXS; tungsten carbide

Sažetak
Tungsten-carbon thin films were deposited onto monocrystalline silicon substrates by reactive sputtering (argon + benzene) in a two-source device . Substrates were in a fixed position relative to the two adjacent cylindrical magnetrons. Benzene partial pressure was 3,75% of the total working gas pressure held at 4 Pa. A series of samples were prepared, with the substrate temperature held at RT, 200°C, and 400°C, respectively, and the substrate potential held at floating potential or biased -70 V with respect to discharge plasma, for each substrate temperature. The generated film consists of densily packed tungsten cardbide grains with an amorphous, carbon rich matrix in between. Applying two dimensional CCD detector, both SAXS and GISAXS were used in order to determine shape, size and orientation of the grains in the film. Lower substrate temperatures resulted in elipsoid-shaped grains oriented in the direction of the two sources, while higher temperatures produced roughly spherical ones.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

POVEZANOST RADA