Pregled bibliografske jedinice broj: 81453
Refractive index profiling of CeO2 thin films using reverse engineering methods
Refractive index profiling of CeO2 thin films using reverse engineering methods // Thin solid films, 413 (2002), 1/2; 198-202 doi:10.1016/S0040-6090(02)00336-X (međunarodna recenzija, članak, znanstveni)
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Naslov
Refractive index profiling of CeO2 thin films using reverse engineering methods
Autori
Janicki, Vesna ; Zorc, Hrvoje
Izvornik
Thin solid films (0040-6090) 413
(2002), 1/2;
198-202
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
hin films; optical properties; refractive index; reverse engineering
(thin films; optical properties; refractive index; reverse engineering)
Sažetak
In some recent papers it was shown that ZrO2 single films can be modeled using inhomogeneous models. A similar modeling approach to analyze CeO2 layers has been used. Films have been produced using a standard reactive evaporation technique. Following the measurement results, obtained by normal incidence transmission and variable angle spectroscopic ellipsometry, reverse engineering of the monolayer with its sub-layers has been performed. Novel in this method is that no assumption of refractive index profile is needed. A very good fit of the experimental data with the reverse engineered multi-layers has been obtained, showing that it is possible to find a fine substructure of analyzed films.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
Poveznice na cjeloviti tekst rada:
Pristup cjelovitom tekstu rada doi
ac.els-cdn.com
www.sciencedirect.com
dx.doi.org
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
