Pregled bibliografske jedinice broj: 813923
Semiconductor device and method for manufacturing semiconductor device
Semiconductor device and method for manufacturing semiconductor device
(2012)
CROSBI ID: 813923 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Semiconductor device and method for manufacturing semiconductor device
Autori
Koričić Marko ; Suligoj Tomislav ; Mochizuki Hidenori ; Morita Soichi
Broj patenta
CN101897017 B
Godina
2012
Datum patenta
12.12.2012.
Nositelj prava
Asahi Kasei EMD Corporation, ,
Sažetak
Provided are the constitution of a lateral transistor suited for hybridization (BiCMOS) of a high-performance lateral transistor (HCBT) and a CMOS transistor and its manufacturing method. A semiconductor device comprises a hybrid of an HCBT (100) and a CMOS transistor (200). The HCBT (100) has an open region (21) opened by etching an element isolating oxide film (6) surrounding an n-hill layer (11), an emitter electrode (31A) and a collector electrode (31B) each of which is formed in the open region (21) and is composed of a polysilicon film having a thickness leading to exposing the n-hill layer (11) exposed by the etching of the element isolating oxide film, and an ultrathin oxide film (24) covering at least a part of the n-hill layer (11). The ultrathin film (24) functions as a protective film for protecting the n-hill layer (11) from being etched when the polysilicon film is etched to form the emitter electrode (31A) and the collector electrode (31B).
Izvorni jezik
Chi
Znanstvena područja
Elektrotehnika
POVEZANOST RADA
Projekti:
036-0361566-1567 - Nanometarski elektronički elementi i sklopovske primjene (Suligoj, Tomislav, MZO ) ( CroRIS)
036-0982904-1642 - Sofisticirane poluvodičke strukture za komunikacijsku tehnologiju (Koričić, Marko, MZO ) ( CroRIS)
HRZZ-IP-2013-11-9006 - Poluvodički elementi visokih performansi za primjene u sklopovima za bežične komunikacije i optičke detektore (HiPerSemi) (Suligoj, Tomislav, HRZZ ) ( CroRIS)
Ustanove:
Fakultet elektrotehnike i računarstva, Zagreb
Profili:
Marko Koričić
(autor)