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Pregled bibliografske jedinice broj: 813843

Semiconductor device and fabrication method thereof


Koričić, Marko; Suligoj, Tomislav; Mochizuki, Hidenori; Morita, So-ichi
Semiconductor device and fabrication method thereof
(2014)


CROSBI ID: 813843 Za ispravke kontaktirajte CROSBI podršku putem web obrasca

Naslov
Semiconductor device and fabrication method thereof

Autori
Koričić, Marko ; Suligoj, Tomislav ; Mochizuki, Hidenori ; Morita, So-ichi

Broj patenta
TW I435435 B

Godina
2014

Datum patenta
21.04.2014.

Nositelj prava
Asahi Kasei EMD Corporation, ,

Sažetak
A configuration of a lateral transistor suited for the hybrid integration (BiCMOS) of a high-performance lateral transistor (HCBT) and a CMOS transistor, and a method for manufacturing the lateral transistor. A semiconductor device includes a HCBT 100 and a CMOS transistor 200 hybrid integrated. The HCBT 100 has an open region 21 opened by etching a device isolating oxide film 6 surrounding an n-hill layer 11. An emitter electrode 31A and a collector electrode 31B are formed in the open region 21 and are composed of a polysilicon film having such a thickness as to expose the n-hill layer 11 exposed by etching the device isolating oxide film, and an ultrathin oxide film 24 covering at least a part of the n-hill layer 11. The ultrathin oxide film 24 functions as a protective film for protecting the n-hill layer 11 from being etched When the polysilicon film is etched.

Izvorni jezik
Chi

Znanstvena područja
Elektrotehnika



POVEZANOST RADA


Projekti:
036-0361566-1567 - Nanometarski elektronički elementi i sklopovske primjene (Suligoj, Tomislav, MZO ) ( CroRIS)
036-0982904-1642 - Sofisticirane poluvodičke strukture za komunikacijsku tehnologiju (Koričić, Marko, MZO ) ( CroRIS)
HRZZ-IP-2013-11-9006 - Poluvodički elementi visokih performansi za primjene u sklopovima za bežične komunikacije i optičke detektore (HiPerSemi) (Suligoj, Tomislav, HRZZ ) ( CroRIS)

Ustanove:
Fakultet elektrotehnike i računarstva, Zagreb

Profili:

Avatar Url Marko Koričić (autor)

Avatar Url Tomislav Suligoj (autor)


Citiraj ovu publikaciju:

Koričić, Marko; Suligoj, Tomislav; Mochizuki, Hidenori; Morita, So-ichi
Semiconductor device and fabrication method thereof
(2014)
Asahi Kasei EMD Corporation (2014) Semiconductor device and fabrication method thereof, TW I435435 B.
@patent{patent, author = {Kori\v{c}i\'{c}, Marko and Suligoj, Tomislav and Mochizuki, Hidenori and Morita, So-ichi}, year = {2014}, keywords = {}, title = {Semiconductor device and fabrication method thereof}, keyword = {} }
@patent{patent, author = {Kori\v{c}i\'{c}, Marko and Suligoj, Tomislav and Mochizuki, Hidenori and Morita, So-ichi}, year = {2014}, keywords = {}, title = {Semiconductor device and fabrication method thereof}, keyword = {} }




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