Pregled bibliografske jedinice broj: 813422
Thermo optical coefficient of tin-oxide films measured by ellipsometry
Thermo optical coefficient of tin-oxide films measured by ellipsometry // Journal of applied physics, 118 (2015), 215306-1 doi:10.1063/1.4937146 (međunarodna recenzija, članak, znanstveni)
CROSBI ID: 813422 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Thermo optical coefficient of tin-oxide films measured by ellipsometry
Autori
Ristić, Davor ; Guddala, Sriram ; Chiappini, Andrea ; Alombert Goget, Guillaume ; Lukowiak, Anna ; Ramponi, Roberta ; Righini, Giancarlo Cesare ; Ivanda, Mile ; Ferrari, Maurizio
Izvornik
Journal of applied physics (0021-8979) 118
(2015);
215306-1
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
Silicon ; Refractive index ; Ellipsometry ; Silica ; Thin film structure
(Refractive index ; Ellipsometry ; Silica ; Thin film structure)
Sažetak
The thermo-optic coefficient of tin-oxide thin films on silicon substrates was measured using fixed wavelength ellipsometry. The applicability of ellipsometry for these measurements is discussed with special considerations to the problem of measurement of the thermo-optic coefficient of materials with very low values of the thermo-optic coefficient (<2 × 10−5). The effect of thermal annealing on the thermo-optic coefficient and on the film-substrate boundary properties of the tin oxide film is also discussed.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
POVEZANOST RADA
Projekti:
HRZZ-IP-2014-09-7046 - Hibridne silicijske nanstrukture za senzorik (NANOSENS) (Ivanda, Mile, HRZZ - 2014-09) ( CroRIS)
Ustanove:
Institut "Ruđer Bošković", Zagreb
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
