Naslov
Inhomogeneities in Y2O3 and CeO2 optical films

Autori
Janicki, Vesna ; Zorc, Hrvoje

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
44th Annual Technical Conference Proceedings / Mattox, Donald M. - Albuquerque (NM) : Society of Vacuum Coaters, 2001, 334-338

Skup
44th Annual Technical Conference of the Society of Vacuum Coaters

Mjesto i datum
Philadelphia (PA), Sjedinjene Američke Države, 21.04.2001. - 26.04.2001

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
oxides; indx of refraction; reverse design

Sažetak
The inhomogeneities in optical films, caused by the onset of nucleation and growth of the film adjacent to amorphous glass surface, are one among numerous sources of errors in precise optical coatings production. In some recent papers it was shown that the model of the multilayer system containing a certain number of films could analyze ZrO2 films. We have used a similar modeling approach to analyze some other optical materials such as Y2O3 and CeO2. Films have been produced using a standard reactive evaporation technique. Following the measurement results, obtained by zero angle transmission and variable angle spectroscopic ellipsometry, reverse design of the monolayer with its sub-layers has been performed. A very good fit of the experimental data with the reverse designed multilayers has been obtained, showing that it is possible to find a fine substructure of analyzed films. The obtained stacks can be used then in the multilayer design process as replacement for a single film adjacent to the substrate.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

POVEZANOST RADA