Naslov
Structural, morphological and electrical properties of TaxN thin films

Autori
Radić, Nikola ; Salamon, Krešimir ; Očko, Miroslav ; Bogdanović-Radović, Ivančica ; Bernstorff, Sigrid

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
E-MRS 2014 Spring Meeting, Symposium G / ? - Lille, 2014, GPI 31-GPI 31

Skup
E-MRS 2014 Spring Meeting, Symposium G: Carbon- or nitrogen-containing nanostructured thin films

Mjesto i datum
Lille, Francuska, 26.05.2014. - 30.05.2014

Vrsta sudjelovanja
Poster

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
structure ; morphology ; electrical properties ; TaxN ; thin films

Sažetak
Beside being already used in microelectronics, the TaxN thin films hold promise to be applied in certain superconducting devices, as well. The TaxN thin films for that purpose are usually deposited on sapphire, or on SiO2 in order to decrease the cost of a final product. Here we report an interim investigation of the thin TaxN films prepared by reactive magnetron deposition in a wide range of composition deposited on SiO2. Pure tantalum target and Ar + N2 working gas were used. Films (cca 100 nm) were deposited at room temperature and 550 degC, respectively. A selected samples deposited at room temperature were subsequently annealed at intermediate temperatures in a protective atmosphere. The chemical composition of the films was determined by ERDA (0.5<x<1.2), while structure and morphology was examined by XRR, GIXRD and GISAXS methods. Generally, the structure of the TaxN films vary from amorphous (x~1.2), over the combination of several Ta:N phases for intermediate x, towards pure rock salt (NaCl) crystal structure (x<0.7). Furthermore, the size of TaxN crystallites increases with increasing nitrogen content. Room temperature resistivity can be described roughly by the 1/(x-x0) dependence regardless existence of various phases. Also, regardless x and regardless various phases, the temperature dependence shows nonmetallic behavior. Both of these characteristics indicate similar underlying electronic transport mechanisms for all the concentrations. However, the investigations performed so far did not show clear superconductivity in these samples.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

POVEZANOST RADA