Pregled bibliografske jedinice broj: 709933
Electronic Structure of Two Precursors for Nanofabrication:[(CH3)3CN]2W[N(CH3)2]2 and Ti(NMe2)2(NEt2)2
Electronic Structure of Two Precursors for Nanofabrication:[(CH3)3CN]2W[N(CH3)2]2 and Ti(NMe2)2(NEt2)2 // The Journal of Physical Chemistry A, 118 (2014), 30; 5636-5641 doi:10.1021/jp505365n (međunarodna recenzija, članak, znanstveni)
CROSBI ID: 709933 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Electronic Structure of Two Precursors for Nanofabrication:[(CH3)3CN]2W[N(CH3)2]2 and Ti(NMe2)2(NEt2)2
Autori
Novak, Igor ; Kovač, Branka ; Jokić, Milan
Izvornik
The Journal of Physical Chemistry A (1089-5639) 118
(2014), 30;
5636-5641
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
UV photoelectron spectroscopy; W and Ti heteroleptic complexes; atomic layer deposition; electronic structure; DFT-OVGF calculations
Sažetak
The electronic structures of bis(tert-butylimino) bis(dimethylamino) tungsten and bis(N-ethylethanaminato)bis(N-methylmethanaminato) titanium heteroleptic complexes, which are precursors for atomic layer deposition of metallic nitride on surfaces, have been investigated by HeI and HeII UV photoelectron spectroscopy and DFT/OVGF calculations. We discuss the electronic structures of these two and other related d0-type complexes in relation to the mechanism of adsorption and decomposition of metal alkylamide precursors on surfaces.
Izvorni jezik
Engleski
Znanstvena područja
Kemija
POVEZANOST RADA
Projekti:
098-0982904-2912 - Samo-udruživanje u gelovima i sinteza funkcionalnih hibridnih materijala (Frkanec, Leo, MZOS ) ( CroRIS)
098-0982915-2945 - Spektroskopija, kemijska svojstva i reakcije biološki aktivnih molekula (Kovač, Branka, MZOS ) ( CroRIS)
Ustanove:
Institut "Ruđer Bošković", Zagreb
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
- MEDLINE
