Naslov
Laser produced Plasmas and Applications in Material processing
(Laser produced Plasmas and Applications in Material Processing)

Autori
Krstulović, Nikša

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
Book of Abstracts of JVC14, EVC12, AMDVG11 and CROSLOVM19 / Nikola Radić, Slobodan Milošević - Zagreb : Linea, 2012, 41-42

ISBN
978-953-98154-1-5

Skup
14th Joint Vacuum Conference, 12th European Vacuum Conference, 11th Annual Meeting of the German Vacuum Society, 19th Croatian-Slovenian Vacuum Meeting

Mjesto i datum
Dubrovnik, Hrvatska, 04.06.2012. - 08.06.2012

Vrsta sudjelovanja
Pozvano predavanje

Vrsta recenzije
Nije recenziran

Ključne riječi
Laser produced plasma; plasma emission; laser synthesis of nanoparticles; X-ray emission; HHG production

Sažetak
Laser produced plasma (LPP) is formed when a focused high power laser pulse impinges a medium wheather in solid, liquid or gaseous phase. Such plasmas have been the subject of considerable attention since the discovery of laser in 1960. Studies of LPP have been driven not only towards full understanding of their fundamental physical properties regarding their formation and evolution but also towards development of wide variety of applications. The LPP can be considered as a source of light, protons, ions, atoms, molecules, nanoparticles, etc. making possibilities of applications of these plasmas very broad. Some of most common applications of LPP include viable route to development of sources for XUV/EUV for next generation photolithography and associated metrology (emission from LPP at 13.5 and 6.x nm) and for 'carbon window' and 'water window' sources for biological imaging by soft x- ray microscopy, Pulsed Laser Deposition (PLD) for thin film production, Laser Induced Breakdown Spectroscopy (LIBS) for elemental analysis and diagnostics in environmental, industrial and process monitoring, nanoparticle production (in gases or under water, in liquids). Further improvement of LPP may be achieved by employing the second laser pulse in the form of double-pulse LPP (DP-LPP) making its capabilities for use in various application even more promising. It implies enhanced emission signal for LIBS application, tailoring of LPP plume for PLD, improvement and higher ionisation for development of XUV/EUV photolitography source (higher Conversion Efficiency, movement toward lower wavelengths). Recently LPP appeared to be promising medium (at higher energies where gas as a medium fails) for High Order Harmonics Generation (HHG) as coherent sub-attosecond X-rays generated due to interaction of TW fs laser pulses with LPP.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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