Naslov
Morphology of thin Ti-films produced by double-pulse laser deposition

Autori
Krstulović, Nikša ; Salamon, Krešimir ; Modič, Martina ; Bišćan, Marijan ; Milat, Ognjen ; Milošević, Slobodan

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
18th International Scientific Meeting on Vacuum Science and Techniques, Book of abstracts / Mozetič, Miran ; Vesel, Alenka - Ljubljana : Slovenian Society for Vacuum Technique (DVTS), 2011, 29-29

ISBN
978-961-92989-2-3

Skup
18th International Scientific Meeting on Vacuum Science and Techniques

Mjesto i datum
Bohinj, Slovenija, 02.06.2011. - 03.06.2011

Vrsta sudjelovanja
Poster

Vrsta recenzije
Nije recenziran

Ključne riječi
pulsed laser depositon; thin films; titanium; morphology; dual-pulse; AFM; x-ray reflectivity

Sažetak
The thin Ti-films were fabricated by dual-pulse laser ablation of titanium target in vacuum. The influence of pulse to pulse delay time tau on the morphology of deposited Ti-films was studied, using x-ray reflectivity and atomic force microscopy. The results show strong dependence of Ti-film thickness, density and roughness on tau, for tau< 2.17 micros. In addition, correlation of average density and thickness of film is observed. These results are discussed in terms of tau dependency of angular distribution of ablated plume. Advantages related to double pulse deposition are reported.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

POVEZANOST RADA