Pregled bibliografske jedinice broj: 531096
Low-temperature fabrication of layered selforganized Ge clusters by RF-sputtering
Low-temperature fabrication of layered selforganized Ge clusters by RF-sputtering // Nanoscale research letters, 6 (2011), 341-1 doi:10.1186/1556-276X-6-341 (međunarodna recenzija, članak, znanstveni)
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Naslov
Low-temperature fabrication of layered selforganized Ge clusters by RF-sputtering
Autori
Pinto, Sara R.C. ; Rolo, Anabela G. ; Buljan, Maja ; Chahboun, Adil ; Bernstorff, Sigrid ; Barradas, Nuno P. ; Alves, Eduardo ; Kashtiban, Reza J. ; Bangert, Ursel ; Gomes, Maria J.M.
Izvornik
Nanoscale research letters (1931-7573) 6
(2011);
341-1
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
self-organized; Ge; GISAXS; magnetron sputtering
Sažetak
In this article, we present an investigation of (Ge + SiO2)/SiO2 multilayers deposited by magnetron sputtering and subsequently annealed at different temperatures. The structural properties were investigated by transmission electron microscopy, grazing incidence small angles X-ray scattering, Rutherford backscattering spectrometry, Raman, and X-ray photoelectron spectroscopies. We show a formation of self-assembled Ge clusters during the deposition at 250°C. The clusters are ordered in a three-dimensional lattice, and they have very small sizes (about 3 nm) and narrow size distribution. The crystallization of the clusters was achieved at annealing temperature of 700°C.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
POVEZANOST RADA
Projekti:
098-0982886-2866 - Temeljna svojstva nanostruktura i defekata u poluvodičima i dielektricima (Pivac, Branko, MZOS ) ( CroRIS)
Ustanove:
Institut "Ruđer Bošković", Zagreb
Profili:
Maja Mičetić
(autor)
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
Uključenost u ostale bibliografske baze podataka::
- AGRICOLA