Pregled bibliografske jedinice broj: 461203
Oxidation-enhanced roughening of thin Co films during sputtering by O2+ ions
Oxidation-enhanced roughening of thin Co films during sputtering by O2+ ions // Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14 (1996), 4; 2192-2201 (međunarodna recenzija, članak, znanstveni)
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Naslov
Oxidation-enhanced roughening of thin Co films during sputtering by O2+ ions
Autori
Mohadjeri, B. ; Petravić, Mladen ; Svensson, B.G.
Izvornik
Journal of vacuum science & technology. A. Vacuum, surfaces, and films (0734-2101) 14
(1996), 4;
2192-2201
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
SIMS; sputtering; Co
Sažetak
Substantial variations in the erosion rate during low energy ~5.5–10.5 keV! O2 1 sputtering of polycrystalline Co thin films are demonstrated by crater depth measurements as a function of sputtering time. At normal incidence the erosion rate is constant, while for oblique angles ~<55°, with respect to surface normal! the rate is between ; 30% and 75% higher at the surface compared to that in the ‘‘bulk.’’ A clear relationship between the width of the preequilibrium region and the sputtering-induced roughness is shown, as revealed by surface stylus profilometry and atomic force microscopy measurements. Sputtering by Ar1 ions, where no chemical compounds form, results in significantly smoother craters and the erosion rate is constant. The development of the preequilibrium region during O2 1 sputtering of Co is attributed to oxidation-induced roughening of Co. A model is proposed for the oxidation-enhanced roughening, which is further supported by results obtained from Rutherford backscattering spectrometry measurements of oxygen incorporation during O2 1 bombardment and Ar1 sputtering combined with oxygen flooding.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus