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Pregled bibliografske jedinice broj: 461203

Oxidation-enhanced roughening of thin Co films during sputtering by O2+ ions


Mohadjeri, B.; Petravić, Mladen; Svensson, B.G.
Oxidation-enhanced roughening of thin Co films during sputtering by O2+ ions // Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14 (1996), 4; 2192-2201 (međunarodna recenzija, članak, znanstveni)


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Naslov
Oxidation-enhanced roughening of thin Co films during sputtering by O2+ ions

Autori
Mohadjeri, B. ; Petravić, Mladen ; Svensson, B.G.

Izvornik
Journal of vacuum science & technology. A. Vacuum, surfaces, and films (0734-2101) 14 (1996), 4; 2192-2201

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
SIMS; sputtering; Co

Sažetak
Substantial variations in the erosion rate during low energy ~5.5–10.5 keV! O2 1 sputtering of polycrystalline Co thin films are demonstrated by crater depth measurements as a function of sputtering time. At normal incidence the erosion rate is constant, while for oblique angles ~<55°, with respect to surface normal! the rate is between ; 30% and 75% higher at the surface compared to that in the ‘‘bulk.’’ A clear relationship between the width of the preequilibrium region and the sputtering-induced roughness is shown, as revealed by surface stylus profilometry and atomic force microscopy measurements. Sputtering by Ar1 ions, where no chemical compounds form, results in significantly smoother craters and the erosion rate is constant. The development of the preequilibrium region during O2 1 sputtering of Co is attributed to oxidation-induced roughening of Co. A model is proposed for the oxidation-enhanced roughening, which is further supported by results obtained from Rutherford backscattering spectrometry measurements of oxygen incorporation during O2 1 bombardment and Ar1 sputtering combined with oxygen flooding.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Profili:

Avatar Url Mladen Petravić (autor)


Citiraj ovu publikaciju:

Mohadjeri, B.; Petravić, Mladen; Svensson, B.G.
Oxidation-enhanced roughening of thin Co films during sputtering by O2+ ions // Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14 (1996), 4; 2192-2201 (međunarodna recenzija, članak, znanstveni)
Mohadjeri, B., Petravić, M. & Svensson, B. (1996) Oxidation-enhanced roughening of thin Co films during sputtering by O2+ ions. Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14 (4), 2192-2201.
@article{article, author = {Mohadjeri, B. and Petravi\'{c}, Mladen and Svensson, B.G.}, year = {1996}, pages = {2192-2201}, keywords = {SIMS, sputtering, Co}, journal = {Journal of vacuum science and technology. A. Vacuum, surfaces, and films}, volume = {14}, number = {4}, issn = {0734-2101}, title = {Oxidation-enhanced roughening of thin Co films during sputtering by O2+ ions}, keyword = {SIMS, sputtering, Co} }
@article{article, author = {Mohadjeri, B. and Petravi\'{c}, Mladen and Svensson, B.G.}, year = {1996}, pages = {2192-2201}, keywords = {SIMS, sputtering, Co}, journal = {Journal of vacuum science and technology. A. Vacuum, surfaces, and films}, volume = {14}, number = {4}, issn = {0734-2101}, title = {Oxidation-enhanced roughening of thin Co films during sputtering by O2+ ions}, keyword = {SIMS, sputtering, Co} }

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus





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