Pregled bibliografske jedinice broj: 461181
Gettering of platinum and silver to cavities formed by hydrogen implantation in silicon
Gettering of platinum and silver to cavities formed by hydrogen implantation in silicon // Nuclear instrumentsand methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 127-128 (1997), 297-300 doi:10.1016/S0168-583X(96)00943-3 (međunarodna recenzija, članak, znanstveni)
CROSBI ID: 461181 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Gettering of platinum and silver to cavities formed by hydrogen implantation in silicon
Autori
A.Kinomura, A. ; Wong-Leung, J. ; Petravić, Mladen ; Williams, J.S.
Izvornik
Nuclear instrumentsand methods in Physics Research Section B: Beam Interactions with Materials and Atoms (0168-583X) 127-128
(1997);
297-300
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
gettering ; Pt ; Ag ; Si ; cavities
Sažetak
The gettering of Pt and Ag to hydrogen-induced cavities was studied using Rutherford backscattering (RES) and secondary ion mass spectrometry (SIMS) for metal doses ranging from 1 x 10(13) to 1 x 10(15) cm(-2). Almost 100% of the introduced metals were relocated to the cavity band for doses lower than 1 x 10(14) cm(-2) and 3 x 10(14) cm(-2) for Pt and Ag, respectively. However, the extent of gettering was observed to be dose dependent. At a higher metal-implant dose of 1 x 10(15) cm(-2), the extent of gettering decreased to 6% for Pt and 50% for Ag. We suggest that silicide phase formation, favoured in the case of high dose Pt, is the main cause of the differences observed between Pt and Ag. Our results indicate that the extent of gettering is influenced strongly by the state of the metal within the implanted layer during annealing.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
