Pregled bibliografske jedinice broj: 461078
Microstructural difference between platinum and silver trapped in hydrogen induced cavities in silicon
Microstructural difference between platinum and silver trapped in hydrogen induced cavities in silicon // Applied physics letters, 72 (1998), 21; 2713-2715 (međunarodna recenzija, članak, znanstveni)
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Naslov
Microstructural difference between platinum and silver trapped in hydrogen induced cavities in silicon
Autori
Kinomura, A. ; Williams, J.S. ; Wong-Leung, J. ; Petravić, Mladen
Izvornik
Applied physics letters (0003-6951) 72
(1998), 21;
2713-2715
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
Pt; Ag; gettering; cavities; Si
Sažetak
The gettering of implanted Pt and Ag to hydrogen-induced cavities in Si has been compared for doses from 1x10(13) to 1x10(15) cm(-2). After annealing at 850 degrees C for 1 h, almost 100% of both implanted metals were relocated to the cavity band for doses less than 1x10(14) cm(-2). At higher doses, large differences were observed in the gettering behaviour of Pt and Ag, where the amount of Pt was saturated at close to a monolayer coverage of cavity walls, whereas the Ag accumulation at cavities continually increased with dose Cross- sectional transmission electron microscopy revealed strong differences in the ability of Pt and Ag to form a bulk phase at the cavities. The results indicate that stable silicide formation at the near-surface and trapping of Ag to implantation damage are the main processes which limit gettering at the higher doses.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
