Naslov
Raman scattering on porous silicon

Autori
Ivanda, Mile ; Balarin, Maja ; Gamulin, Ozren ; Ristić, Davor ; Musić, Svetozar ; Ristić, Mira ; Kosović, Marin ; Furić, Krešimir

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
MIPRO 2009 32nd International Convention, Proceedings of MEET and GVS conferences / Biljanović, Petar ; Skala, Karolj - Rijeka : Hrvatska udruga za informacijsku i komunikacijsku tehnologiju, elektroniku i mikroelektroniku - MIPRO, 2009, 58-61

ISBN
978-953-233-044-1

Skup
MIPRO 2009 32nd International Convention

Mjesto i datum
Opatija, Hrvatska, 25.05.2009. - 29.05.2009

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
Porous silicon; Raman spectroscopy; SEM

Sažetak
Porous silicon (PSi) samples were prepared by electrochemical etching of silicon-on-insulator wafers, consisting of 22 μm thick p-type (111) silicon epitaxial layer on a 1 μm SiO2 layer on silicon substrates, by varying the concentration of 48% HF in ethanol solution and by varying the etching time. Within the epitaxial layer micro- and nano-pores of different sizes in dependence on HF concentration and etching time were obtained. The structural and optical properties of prepared samples were investigated by Raman spectroscopy, and scanning electron microscopy (SEM). SEM images showed high density of micrometer sized pores separated by the cobweb-like silicon structures whose morphology and density depend on the HF concentration and etching time. The Raman spectra of such structures show transversal optical TO(gama) phonon bands that were broadened and red-shifted depending on the size of cobweb wires. The diameter distributions of the cobweb wires where determined by applying the phonon confinement model. When compared to the SEM diameters, they were 3-4 times smaller indicating the sub-structure, not observable by SEM microscopy that exists in silicon wires.

Izvorni jezik
Engleski

Znanstvena područja
Fizika, Kemija

POVEZANOST RADA