Pregled bibliografske jedinice broj: 444785
Structural study of Si1-x Gex nanocrystals embedded in SiO2 films
Structural study of Si1-x Gex nanocrystals embedded in SiO2 films // Thin solid films, 518 (2010), 9; 2569-2572 doi:10.1016/j.tsf.2009.09.148 (međunarodna recenzija, članak, znanstveni)
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Naslov
Structural study of Si1-x Gex nanocrystals embedded in SiO2 films
Autori
Pinto, S.R.C. ; Kashtiban, R.J. ; Rolo, A.G. ; Buljan, Maja ; Chahboun, A. ; Bangert, U. ; Barradas, N.P. ; Khodorov, A. ; Alves, E. ; Gomes, M.J.M.
Izvornik
Thin solid films (0040-6090) 518
(2010), 9;
2569-2572
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
Si1-xGex ; nanocrystals ; SiO2 ; HRTEM ; GISAXS ; Raman ; Flash memory ; semiconductor
Sažetak
We have investigated the structural properties of Si1-xGex nanocrystals formed in an amorphous SiO2 matrix by magnetron sputtering deposition. The influence of deposition parameters on nanocrystals size, shape, arrangement and internal structure was examined by X-ray diffraction, Raman spectroscopy, grazing incidence small angle X-ray scattering, and high resolution transmission electron microscopy. We found conditions for the formation of spherical Si1-xGex nanocrystals with average sizes between 3 to 13 nm, uniformly distributed in the matrix. In addition we have shown the influence of deposition parameters on average nanocrystal size and Ge content x.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
POVEZANOST RADA
Projekti:
098-0982886-2866 - Temeljna svojstva nanostruktura i defekata u poluvodičima i dielektricima (Pivac, Branko, MZOS ) ( CroRIS)
Ustanove:
Institut "Ruđer Bošković", Zagreb
Profili:
Maja Mičetić
(autor)
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus