Naslov
Optical emission spectroscopy characterization of oxygen plasma during oxidation of aluminium foils

Autori
Krstulović, Nikša ; Cvelbar, Uroš ; Vesel, Alenka ; Milošević, Slobodan ; Mozetič, Miran

Izvornik
Materiali in tehnologije (1580-2949) 43 (2009), 5; 245-249

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
RF plasma; optical emission spectroscopy; aluminijska folija

Sažetak
Highly reactive oxygen plasma was applied for oxidation of aluminium foils. Plasma was created within Radio-Frequency discharge operating at the power of 300 W and the frequency of 27.12 MHz. Samples of Al foils with the dimensions of 20x40 mm2 were placed into the discharge chamber. During the treatment of foils with oxygen plasma, optical spectra were measured simultaneously with an optical spectrometer. The predominant spectral features observed during the treatment were atomic oxygen lines at 777.4 nm and 844.6 nm, atomic hydrogen lines and OH band at 309 nm. As the oxidation took place another spectral features appeared. The major lines were Na at 589.35 nm and K at 766.5 nm 769.9 nm. The time evolution of Na and K peaks showed well defined maxima at about a minute of plasma treatment. These maxima depended on the pressure in the discharge chamber. At lowest pressure of 30 Pa the maxima appeared after about 100 sec while at the pressure of 80 Pa the maxima appeared after about 50 sec. At the pressure of 120 Pa these maxima appeared after about 125 seconds. This behavior was explained by segregation of Na and K on the surface of the foil and rapid desorption into the gas phase.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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