Naslov
GISAXS and WAXS analysis of amorphous-nanocrystalline silicon thin films

Autori
Juraić, Krunoslav ; Gracin, Davor ; Meljanac, Daniel ; Gajović, Andreja ; Dubček, Pavo ; Bernstorff, Sigrid ; Čeh, Miran

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Skup
E-MRS 2009 Spring Meeting

Mjesto i datum
Strasbourg, Francuska, 07.06.2009. - 12.06.2009

Vrsta sudjelovanja
Poster

Vrsta recenzije
Nije recenziran

Ključne riječi
amorphous-nanocrytalline silicon; GISAXS; GIWAXS; HRTEM; nanoparticles

Sažetak
The amorphous-nanocrstalline silicon thin film multilayer structures were deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) on the glass or glass + SnOx substrate with various silicon nanocrystal size distributions and volume fractions. The samples were examined by Grazing Incidence Small Angle X-ray Scattering (GISAXS) and Wide Angle X-ray Scattering (WAXS) at the Austrian SAXS beamline (Synchrotron Elettra, Trieste) using X-ray beam energy of 8 keV. The grazing incidence angle varied from the critical angle to 0.02 deg. above the critical angle. This allowed the examination of the samples at different depth and distinguished surface scattering contribution from particles scattering in bulk. Contribution of surface scattering was estimated using results of Atomic Force Microscopy (AFM) image roughness analysis. Sizes of “ particles” calculated from horizontal and vertical sections of 2D GISAXS patterns were between a 2 and 20 nanometers. Since GISAXS is sensitive to electron density difference (contrast) between the scattering bodies and the surrounding matrix, it is not evident whether the particles are nanocrystals or just voids embedded in amorphous matrix. However, the size of crystals calculated from analysis of peaks line-shape in WAXS spectra and crystal size distribution obtained from HRTEM images agree well with size of “ particles” estimated from GISAXS, strongly indicating that observed particles are silicon nanocrystals.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

POVEZANOST RADA