Naslov
Calculation of Internal Stress from Thin Film Buckling Pattern

Autori
Jerčinović, Marko ; Radić, Nikola ; Stubičar, Mirko ; Zorc, Hrvoje

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
16th International Scientific Meeting on Vacuum Science and Technique : Book of Abstracts / Kovač, Janez ; Mozetič, Miran - Ljubljana : Društvo za vakuumsko tehniko Slovenije, 2009, 20-20

ISBN
978-961-90025-7-5

Skup
International Scientific Meeting on Vacuum Science and Technique (16 ; 2009)

Mjesto i datum
Bohinj, Slovenija, 04.06.2009. - 05.06.2009

Vrsta sudjelovanja
Poster

Vrsta recenzije
Nije recenziran

Ključne riječi
thin films; buckling; stress

Sažetak
Very high internal stresses (sometimes about few GPa in compression) are often developed in thin films and coatings produced by sputtering methods. Those are then susceptible to delamination and buckling, which is undesirable for future technological applications, but this phenomenon can be used for characterization of mechanical properties of both films and substrates. In order to examine the effects of magnetron deposition parameters (working gas pressure, depositon rate) and film thickness upon the onset of the macroscopic structural defects, a series of tungsten-films-on-glass samples were prepared. The effect of aluminum buffer layer has been checked, as well. A geometry of developed buckling structures (straight-side wrinkles, telephone cord buckles) was determined by microscopic observations, while topography has been measured by profilometar. Using the geometrical analysis of buckling structures and elastic theory we were able to calculate mechanical stress in thin tungsten film and compare the result to the values obtained by profilometry and XRD measurements.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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