Naslov
Surface characterization of carbon-tungsten alloys prepared by reactive sputtering

Autori
Radić, Nikola ; Dubček, Pavo ; Ristić, Mira ; Musić, Svetozar ; Tonejc, Antun ; Bernstorff, Sigrid

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
E-MRS 2008 Spring Meeting BOOK OF ABSTRACTS / - Strasbourg, 2008, X-x

Skup
E-MRS 2008 Spring Meeting, Symposium A: Carbon-based nanostructured composite films

Mjesto i datum
Strasbourg, Francuska, 26.05.2008. - 30.05.2008

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
carbon-tungsten alloys ; reactive sputtering ; surface characterization

Sažetak
The surface features of tungsten-carbon thin films, deposited onto monocrystalline silicon substrates by reactive magnetron sputtering (argon + benzene) has been investigated by GISAXS, AFM and SEM. Benzene partial pressure was varied from 1% to 10% of the total working gas pressure in order to produce W-C films with variable fraction of incorporated unbound carbon. A series of samples were prepared, with the substrate temperature held at RT, 200°C, and 400°C, and the substrate potential held at floating potential or biased -70 V with respect to discharge plasma. Structure of the films is found to be nanocrystalline to amorphous WC1-x as the carbon content increase, with a fine dispersion of DLC-clusters imbedded between nanograins. The GISAXS analysis revealed the particle size of about 3 nm within the films. The same results indicate that the surface of the examined films is rather smooth - surface roughness is about 0, 5 nm, with a very short inplane height-height correlation length. The AFM measurements and SEM results are employed to characterize the surface and subsurface layer of the films, in order to examine a degree of bulk structure propagation to the surface.

Izvorni jezik
Engleski

Znanstvena područja
Fizika, Kemija

POVEZANOST RADA