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Pregled bibliografske jedinice broj: 371021

Low-pressure inductively coupled oxygen plasma loaded with acetone vapours studied by optical emission spectroscopy

Glavan, Nataša; Krstulović, Nikša; Kregar, Zlatko; Milošević, Slobodan
Low-pressure inductively coupled oxygen plasma loaded with acetone vapours studied by optical emission spectroscopy // Midem Conference 2008 Proceedings / Amon, S ; Mozetič, M ; Šorli, I (ur.).
Ljubljana: Society for Microelectronics, Electronic Components and Materials (MIDEM), 2008. str. 235-238 (poster, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)

CROSBI ID: 371021 Za ispravke kontaktirajte CROSBI podršku putem web obrasca

Naslov
Low-pressure inductively coupled oxygen plasma loaded with acetone vapours studied by optical emission spectroscopy

Autori
Glavan, Nataša ; Krstulović, Nikša ; Kregar, Zlatko ; Milošević, Slobodan

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
Midem Conference 2008 Proceedings / Amon, S ; Mozetič, M ; Šorli, I - Ljubljana : Society for Microelectronics, Electronic Components and Materials (MIDEM), 2008, 235-238

ISBN
978-961-91023-8-1

Skup
44th International Conference on Microelectronics, devices and materials at the Workshop on Advanced Plasma Technologies

Mjesto i datum
Portorož, Slovenija, 17.09.08-19.09.2008

Vrsta sudjelovanja
Poster

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
RF aceton plasma ; optical emission spectroscopy

Sažetak
Low-pressure inductively coupled oxygen plasma sustained within a linear glass tube was loaded by acetone vapours and characterized by means of the optical emission spectroscopy. Both spatial and temporal emission measurements were performed. Spectra consist mainly of the CO molecular bands which were used to characterize the plasma conditions. Spectral intensity of CO molecular band was studied versus partial acetone vapour and oxygen pressure.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA

Projekti:
035-0352851-2856 - Laserska spektroskopija hladne plazme za obradu materijala (Milošević, Slobodan, MZOS ) ( CroRIS)
069-0691668-3007 - Istraživanje metoda sprječavanja onečišćenja mora od objekata morske tehnologije (Dobrinić, Julijan, MZOS ) ( CroRIS)

Ustanove:
Tehnički fakultet, Rijeka

Profili:

Avatar Url Zlatko Kregar (autor)

Avatar Url Slobodan Milošević (autor)

Avatar Url Nikša Krstulović (autor)

Avatar Url Nataša Glavan (autor)

Poveznice na cjeloviti tekst rada:

Pristup cjelovitom tekstu rada

Citiraj ovu publikaciju:

Glavan, Nataša; Krstulović, Nikša; Kregar, Zlatko; Milošević, Slobodan
Low-pressure inductively coupled oxygen plasma loaded with acetone vapours studied by optical emission spectroscopy // Midem Conference 2008 Proceedings / Amon, S ; Mozetič, M ; Šorli, I (ur.).
Ljubljana: Society for Microelectronics, Electronic Components and Materials (MIDEM), 2008. str. 235-238 (poster, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
Glavan, N., Krstulović, N., Kregar, Z. & Milošević, S. (2008) Low-pressure inductively coupled oxygen plasma loaded with acetone vapours studied by optical emission spectroscopy. U: Amon, S., Mozetič, M. & Šorli, I. (ur.)Midem Conference 2008 Proceedings.
@article{article, author = {Glavan, Nata\v{s}a and Krstulovi\'{c}, Nik\v{s}a and Kregar, Zlatko and Milo\v{s}evi\'{c}, Slobodan}, year = {2008}, pages = {235-238}, keywords = {RF aceton plasma, optical emission spectroscopy}, isbn = {978-961-91023-8-1}, title = {Low-pressure inductively coupled oxygen plasma loaded with acetone vapours studied by optical emission spectroscopy}, keyword = {RF aceton plasma, optical emission spectroscopy}, publisher = {Society for Microelectronics, Electronic Components and Materials (MIDEM)}, publisherplace = {Portoro\v{z}, Slovenija} }
@article{article, author = {Glavan, Nata\v{s}a and Krstulovi\'{c}, Nik\v{s}a and Kregar, Zlatko and Milo\v{s}evi\'{c}, Slobodan}, year = {2008}, pages = {235-238}, keywords = {RF aceton plasma, optical emission spectroscopy}, isbn = {978-961-91023-8-1}, title = {Low-pressure inductively coupled oxygen plasma loaded with acetone vapours studied by optical emission spectroscopy}, keyword = {RF aceton plasma, optical emission spectroscopy}, publisher = {Society for Microelectronics, Electronic Components and Materials (MIDEM)}, publisherplace = {Portoro\v{z}, Slovenija} }

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