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Pregled bibliografske jedinice broj: 371019

Spatial and Temporal OES Characterization of RF Inductively Coupled Plasma

Kregar, Zlatko; Glavan, Nataša; Krstulović, Nikša; Milošević, Slobodan
Spatial and Temporal OES Characterization of RF Inductively Coupled Plasma // 44th International Conference on Microelectronics, Devices and Materials and the Workshop on Advanced Plasma Technologies (Midem 2008) : Proceedings / Amon, S ; Mozetič, M ; Šorli, I (ur.).
Ljubljana: Society for Microelectronics, Electronic Components and Materials (MIDEM), 2008. str. 219-222 (poster, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)

CROSBI ID: 371019 Za ispravke kontaktirajte CROSBI podršku putem web obrasca

Naslov
Spatial and Temporal OES Characterization of RF Inductively Coupled Plasma

Autori
Kregar, Zlatko ; Glavan, Nataša ; Krstulović, Nikša ; Milošević, Slobodan

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
44th International Conference on Microelectronics, Devices and Materials and the Workshop on Advanced Plasma Technologies (Midem 2008) : Proceedings / Amon, S ; Mozetič, M ; Šorli, I - Ljubljana : Society for Microelectronics, Electronic Components and Materials (MIDEM), 2008, 219-222

ISBN
978-961-91023-8-1

Skup
International Conference on Microelectronics, Devices and Materials (44 ; 2008) ; Workshop on Advanced Plasma Technologies

Mjesto i datum
Portorož, Slovenija, 17.09.2008. - 19.09.2008

Vrsta sudjelovanja
Poster

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
RF plasma; optical emission spectroscopy

Sažetak
Inductively coupled RF plasma generated in a linear glass tube was studied by means of optical emission spectroscopy. Low pressure plasma of various gases (hydrogen and oxygen) and vapours (acetone-C3H5OH, water) was created by 8 turn coil with an EM field oscillating at 13.56 MHz. Their spectral intensities were spatially and temporally resolved and then analyzed.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA

Projekti:
035-0352851-2856 - Laserska spektroskopija hladne plazme za obradu materijala (Milošević, Slobodan, MZOS ) ( CroRIS)

Ustanove:
Tehnički fakultet, Rijeka

Profili:

Avatar Url Zlatko Kregar (autor)

Avatar Url Slobodan Milošević (autor)

Avatar Url Nikša Krstulović (autor)

Avatar Url Nataša Glavan (autor)

Citiraj ovu publikaciju:

Kregar, Zlatko; Glavan, Nataša; Krstulović, Nikša; Milošević, Slobodan
Spatial and Temporal OES Characterization of RF Inductively Coupled Plasma // 44th International Conference on Microelectronics, Devices and Materials and the Workshop on Advanced Plasma Technologies (Midem 2008) : Proceedings / Amon, S ; Mozetič, M ; Šorli, I (ur.).
Ljubljana: Society for Microelectronics, Electronic Components and Materials (MIDEM), 2008. str. 219-222 (poster, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
Kregar, Z., Glavan, N., Krstulović, N. & Milošević, S. (2008) Spatial and Temporal OES Characterization of RF Inductively Coupled Plasma. U: Amon, S., Mozetič, M. & Šorli, I. (ur.)44th International Conference on Microelectronics, Devices and Materials and the Workshop on Advanced Plasma Technologies (Midem 2008) : Proceedings.
@article{article, author = {Kregar, Zlatko and Glavan, Nata\v{s}a and Krstulovi\'{c}, Nik\v{s}a and Milo\v{s}evi\'{c}, Slobodan}, year = {2008}, pages = {219-222}, keywords = {RF plasma, optical emission spectroscopy}, isbn = {978-961-91023-8-1}, title = {Spatial and Temporal OES Characterization of RF Inductively Coupled Plasma}, keyword = {RF plasma, optical emission spectroscopy}, publisher = {Society for Microelectronics, Electronic Components and Materials (MIDEM)}, publisherplace = {Portoro\v{z}, Slovenija} }
@article{article, author = {Kregar, Zlatko and Glavan, Nata\v{s}a and Krstulovi\'{c}, Nik\v{s}a and Milo\v{s}evi\'{c}, Slobodan}, year = {2008}, pages = {219-222}, keywords = {RF plasma, optical emission spectroscopy}, isbn = {978-961-91023-8-1}, title = {Spatial and Temporal OES Characterization of RF Inductively Coupled Plasma}, keyword = {RF plasma, optical emission spectroscopy}, publisher = {Society for Microelectronics, Electronic Components and Materials (MIDEM)}, publisherplace = {Portoro\v{z}, Slovenija} }

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