Naslov
STRUCTURAL ANALYSIS OF AMORPHOUS Si FILMS PREPARED BY MAGNETRON SPUTTERING

Autori
Grozdanić, Danijela ; Slunjski, Robert ; Rakvin, Boris ; Pivac, Branko ; Dubček, Pavo ; Radić, Nikola ; Bernstorff, Sigrid ;

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
Programme & Book of Abstracts / Bohatka, S. - Deberecen : REXPO Kft., 2008, 120-120

Skup
12th JVC, 10th EVC, 7th Annual meeting of GVS

Mjesto i datum
Balatonalmádi, Mađarska, 22.09.2008. - 26.09.2008

Vrsta sudjelovanja
Poster

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
amorphous silicon; EPR; GISAXS; GIXRD

Sažetak
We present a study of structural changes occurring in thin amorphous silicon (a-Si). The a-Si films were deposited on single-crystalline Si substrates held at room temperature or 200°C by magnetron sputtering of a Si target in pure Ar atmosphere, and therefore the films were hydrogen-free. All samples were annealed in vacuum and subsequently studied by EPR, XRR and GISAXS. A strong decrease in the dangling bonds content at lower annealing temperatures, and then an increase of it at around 550°C, suggested significant structural changes. In parallel the samples were studied by GISAXS which confirmed changes at the nanometric scale attributed to voids in the material. A nice correlation of the results of the two techniques shows advantages of this approach in the analysis of structural changes in a-Si material.

Izvorni jezik
Engleski

Znanstvena područja
Fizika, Kemija

POVEZANOST RADA