Naslov
Optical emission spectroscopy of inductively coupled RF hydrogen plasma

Autori
Kregar, Zlatko ; Krstulović, Nikša ; Milošević, Slobodan

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
Brijuni conference, Book of abstracts / Bosanac, Slobodan - Zagreb : Institut Ruđer Bošković, 2008, 28-28

ISBN
953-6690-75-6

Skup
Brijuni conference, Hydrogen: A universal saga

Mjesto i datum
Brijuni, Hrvatska, 25.08.2008. - 29.08.2008

Vrsta sudjelovanja
Poster

Vrsta recenzije
Nije recenziran

Ključne riječi
hydrogen; inductively coupled plasma; optical emission spectroscopy

Sažetak
Low temperature plasmas have a broad area of applications for treatment of various materials. This points to the need for real time plasma characterization during processing. Inductively coupled plasmas are of particular interest since details of the inductive coil design and its surrounding can be used to influence plasma content. Low pressure plasma was created in a glass tube with wrapped copper wire in 8 turns (coil). The coil was connected to a RF generator with a frequency of 13.56 MHz. The power was adjustable up to 300 W. Hydrogen plasma was investigated by means of a LIBS2000+ spectrometer. Optical fiber was placed perpendicularly to the tube, and was moved along the length of the tube which allows spatial resolution. Spectral signatures of hydrogen atom (Balmer series), as well as hydrogen molecule (Fulcher band) were observed. Three distinct zones within the tube with different plasma behaviour (before the coil, within the coil and after the coil) were observed. As discharge power is increased or hydrogen pressure decreased the transition from mode sustained by the static electric field (E-mode) to the mode sustained by the induced electromagnetic field (H-mode) is observed. Intensity ratios between different hydrogen atomic lines, and between atomic lines and Fulcher band were used to monitor plasma parameters. Various hydrogen plasma applications are considered.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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