Naslov
Investigation of sputter craters after gdoes analysis of TiCN coatings

Autori
Panjan, Peter ; Goršćak, Đurđica ; Čekada, Miha ; Ćurković, Lidija

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, prošireni sažetak, znanstveni

Izvornik
2nd International conference on the heat treatment and surface engineering of tools and dies : extended abstracts / Leskovšek, Vojteh ; Smoljan, Božo ; Jager, Heimo ; Jenko, Monika - Ljubljana : Inštitut za kovinske materiale in tehnologije, 2008, 65-66

Skup
2nd International conference on the heat treatment and surface engineering of tools and dies

Mjesto i datum
Bled, Slovenija, 25.05.2008. - 28.05.2008

Vrsta sudjelovanja
Plenarno

Vrsta recenzije
Podatak o recenziji nije dostupan

Ključne riječi
PVD ; TiCN coatings ; sputter craters

Sažetak
The investigated TiCN coatings were deposited on a chromium-mollybdenium-vanadium alloyed tool steel Sleipner of Uddeholm Company by cathode arc evaporation technique (BAI 1200) in Balzers Hard Coating Center (Kapfenberg, Austria). In this work the depth profiling method glow discharge optical emission spectrometry (GDOES) is used for determining the thickness of TiCN coating after determining the sputtering rate. GDOES is a rapid depth profiling technique, this analysis is destructive and there is a formation of sputter craters on the sample surface. The obtained data were compared with the thickness values obtained from the SEM fracture cross-sections. Structure of sputter craters after GDOES experiment at different coating depths as well as the coating surface were evaluated by the scanning electron microscopy (SEM), 3D profilometer and atomic force microscopy (AFM). The chemical composition of the coating was determined by the EDS method.

Izvorni jezik
Engleski

Znanstvena područja
Strojarstvo

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