Pretraga

Pretražite po imenu i prezimenu autora, mentora, urednika, prevoditelja

Napredna pretraga

Pregled bibliografske jedinice broj: 319911

Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy

Kregar, Zlatko; Krstulović, Nikša; Milošević, Slobodan; Kenda, Klemen; Cvelbar, Uroš; Mozetič, Miran
Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy // IEEE Transactions on Plasma Science, 36 (2008), 4; 1368-1369 doi:10.1109/TPS.2008.920896 (međunarodna recenzija, članak, znanstveni)

CROSBI ID: 319911 Za ispravke kontaktirajte CROSBI podršku putem web obrasca

Naslov
Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy

Autori
Kregar, Zlatko ; Krstulović, Nikša ; Milošević, Slobodan ; Kenda, Klemen ; Cvelbar, Uroš ; Mozetič, Miran

Izvornik
IEEE Transactions on Plasma Science (0093-3813) 36 (2008), 4; 1368-1369

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
oxygen plasma; optical emission spectroscopy

Sažetak
Inductively coupled RF oxygen plasma generated by inductive coil wrapped around a linear glass tube is studied. Images of plasma properties in the linear reactor are presented. Plasma diagnostics was performed by spatially resolved optical emission spectroscopy

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA

Projekti:
035-0352851-2856 - Laserska spektroskopija hladne plazme za obradu materijala (Milošević, Slobodan, MZOS ) ( CroRIS)

Ustanove:
Institut za fiziku, Zagreb

Profili:

Avatar Url Zlatko Kregar (autor)

Avatar Url Slobodan Milošević (autor)

Avatar Url Nikša Krstulović (autor)

Poveznice na cjeloviti tekst rada:

doi

Citiraj ovu publikaciju:

Kregar, Zlatko; Krstulović, Nikša; Milošević, Slobodan; Kenda, Klemen; Cvelbar, Uroš; Mozetič, Miran
Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy // IEEE Transactions on Plasma Science, 36 (2008), 4; 1368-1369 doi:10.1109/TPS.2008.920896 (međunarodna recenzija, članak, znanstveni)
Kregar, Z., Krstulović, N., Milošević, S., Kenda, K., Cvelbar, U. & Mozetič, M. (2008) Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy. IEEE Transactions on Plasma Science, 36 (4), 1368-1369 doi:10.1109/TPS.2008.920896.
@article{article, author = {Kregar, Zlatko and Krstulovi\'{c}, Nik\v{s}a and Milo\v{s}evi\'{c}, Slobodan and Kenda, Klemen and Cvelbar, Uro\v{s} and Mozeti\v{c}, Miran}, year = {2008}, pages = {1368-1369}, DOI = {10.1109/TPS.2008.920896}, keywords = {oxygen plasma, optical emission spectroscopy}, journal = {IEEE Transactions on Plasma Science}, doi = {10.1109/TPS.2008.920896}, volume = {36}, number = {4}, issn = {0093-3813}, title = {Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy}, keyword = {oxygen plasma, optical emission spectroscopy} }
@article{article, author = {Kregar, Zlatko and Krstulovi\'{c}, Nik\v{s}a and Milo\v{s}evi\'{c}, Slobodan and Kenda, Klemen and Cvelbar, Uro\v{s} and Mozeti\v{c}, Miran}, year = {2008}, pages = {1368-1369}, DOI = {10.1109/TPS.2008.920896}, keywords = {oxygen plasma, optical emission spectroscopy}, journal = {IEEE Transactions on Plasma Science}, doi = {10.1109/TPS.2008.920896}, volume = {36}, number = {4}, issn = {0093-3813}, title = {Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy}, keyword = {oxygen plasma, optical emission spectroscopy} }

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus

Citati:

    Altmetrijski pokazatelji:


    Podijeli:





    Contrast
    Increase Font
    Decrease Font
    Dyslexic Font
    CROSBI koristi kolačiće (cookies) kako bi poboljšao funkcionalnost stranice.