Naslov
Monitoring of a Mylar foil degradation in oxygen RF plasma by means of optical emission spectroscopy

Autori
Krstulović, Nikša ; Milošević, Slobodan ; Cvelbar, Uroš ; Vesel, Alenka ; Mozetič, Miran

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
Zbornik povzetkov 14. mednarodni znanstveni sestanek Vakuumska znanost in tehnika / Šetina, Janez ; Kovač, Janez - Ljubljana : Društvo za vakuumsko tehniko Slovenije, 2007, 9-9

Skup
14. mednarodni znanstveni sestanek Vakuumska znanost in tehnika

Mjesto i datum
Bled, Slovenija, 01.06.2007

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Nije recenziran

Ključne riječi
oxygen plasma; polymer; functionalization; PET

Sažetak
Optical emission spectroscopy (OES) was applied for real-time measuring of the reaction products during plasma treatment of a Mylar (PET) foil. Plasma was created in pure oxygen by inductively coupled radiofrequency (RF) discharge. The discharge chamber was a glass tube with the length of 50cm and the inner diameter of 3.6cm. Oxygen was leaked continuously into the discharge tube so the pressure during experiments was 75Pa. Plasma parameters were measured prior to experiments with a double Langmuir probe and with catalytic probe. The electron temperature was about 6eV, plasma density about 1x1016m-3 and the neutral atom density about 1x1022m-3. Optical emission spectra were measured in the range from 200 to 950nm. For the first 10s of plasma treatment the OES showed the presence of oxygen radicals only, mainly at 777 and 844 nm. As the plasma treatment was continued, the OES spectra became richer with significant emission from CO (both Angstrom and 3rd positive band) and OH (A-X band) due to extensive PET oxidation as well as from Balmer series. Simultaneously, the O peaks decreased significantly. After prolonged plasma treatment, the O peaks recovered, the CO band vanished while the OH and H peaks still persisted. In the final period of the treatment, only atomic oxygen lines remained. The appearance of the oxygen-containing functional groups on the sample surface was measured simultaneously during the plasma treatment by XPS and its concentration was the highest when the CO and OH became measurable. The results showed that OES was a powerful tool for studying the evolution of PET oxidation by plasma treatment.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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