Naslov
Optical emission spectroscopy of oxygen low-pressure inductively coupled plasma loaded by ethanol, methanol and acetone vapours

Autori
Glavan, Nataša ; Krstulović, Nikša ; Kregar, Zlatko ; Milošević, Slobodan

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
Zbornik Povzetkov 14. Mednarodni znanstveni sestanek Vakuumska znanost in tehnika / Šetina, Janez ; Kovač, Janez - Ljubljana : Društvo za vakuumsko tehniko Slovenije, 2007, 18-18

Skup
14. Mednarodni znanstveni sestanek Vakuumska znanost in tehnika

Mjesto i datum
Bled, Slovenija, 01.06.2007

Vrsta sudjelovanja
Poster

Vrsta recenzije
Nije recenziran

Ključne riječi
Plasma; acetone; ethanol; methanol; Emission spectroscopy; RF discharge

Sažetak
Transition phenomena in low-pressure inductively coupled oxygen plasma were studied by means of optical emission spectroscopy while plasma was loaded by ethanol (C2H5OH), methanol (CH3OH) or acetone (C3H5OH) vapours. Plasma was generated by inductively coupled RF generator (RIZ SW-amp.) with the frequency of 13.56 MHz and adjustable output power up to 300 W. The plasma was maintained in a glass discharge tube with the inner diameter of 3.6 cm. The discharge tube was pumped with a rotary pump. Partial pressures in the tube were measured by a Baratron gauge. Vapors were introduced into plasma region through glass capillary tube connected to temperature stabilized liquid container through precise Teflon valve. Plasma radiation was measured with CCD Ocean Optics spectrometers (UV- VIS-CGI or LIBS2000+) with sampling rate of two spectra per second. Emission from highly excited species was found in the ultraviolet, visible and infrared part of the spectra from 200 to 1000 nm. The rich emission spectra were dominated by molecular spectra of CO (3rd positive band and Angstrom band) and OH (A-X band) radicals. Atomic transition lines from hydrogen (H , H ) and oxygen O(3p5P  3s5S), and O(4p3P  3s3S) were observed as well. By observing spectral line intensity ratios, relative abundance of OH, CO, H and O radicals was studied versus oxygen/vapor pressure ratio and discharge power. Optimum conditions for production of various radicals are discussed in terms of vapors characteristics and possible dissociation and recombination mechanisms.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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