IR and Raman study of Si_(1-x)C_x:H amorphous thin films

Lugomer, Stjepan; Ivanda, Mile; Gracin, Davor; Furić, Krešimir; Maksimović, Aleksandar

Pregled bibliografske jedinice broj: 299376

IR and Raman study of Si_(1-x)C_x:H amorphous thin films

Lugomer, Stjepan; Ivanda, Mile; Gracin, Davor; Furić, Krešimir; Maksimović, Aleksandar

IR and Raman study of Si_(1-x)C_x:H amorphous thin films // Journal of molecular structure, 267 (1992), 347-351 (međunarodna recenzija, članak, znanstveni)

CROSBI ID: 299376 Za ispravke kontaktirajte CROSBI podršku putem web obrasca

Naslov
IR and Raman study of Si_(1-x)C_x:H amorphous thin films

Autori
Lugomer, Stjepan ; Ivanda, Mile ; Gracin, Davor ; Furić, Krešimir ; Maksimović, Aleksandar

Izvornik
Journal of molecular structure (0022-2860) 267 (1992); 347-351

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
infrared specroscopy ; Raman ; amorphous silicon carbide

Sažetak
Amorphous hydrogenated a-Si_(1-x)C_x:H thin films have been obtained by means of DC magnetron sputtering in the benzene vapour. Comparative IR and Raman spectroscopy study of carbon incorporation in the silicon matrix have been performed. It was found that carbon incorporates in the form of the CH_3-groups, individual C-atoms and the C_6H_6 molecules.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

POVEZANOST RADA

Projekti:
1-03-066

Ustanove:
Institut "Ruđer Bošković", Zagreb

Profili:

Davor Gracin (autor)