Pregled bibliografske jedinice broj: 287338
Optical characterisation of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements
Optical characterisation of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements // Applied optics, 46 (2007), 24; 6084-6091 doi:10.1364/AO.46.006084 (međunarodna recenzija, članak, znanstveni)
CROSBI ID: 287338 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Optical characterisation of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements
Autori
Janicki, Vesna ; Sancho Parramon, Jordi ; Stenzel, Olaf ; Lappschies, Marc ; Görtz, Björn ; Rickers, Christoph ; Polenzky, Christina ; Richter, Uwe
Izvornik
Applied optics (0003-6935) 46
(2007), 24;
6084-6091
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
antireflective coating ; optical characterisation ; hybrid coating ; reverse engineering ; variable angle spectroscopic ellipsometry
Sažetak
A hybrid antireflective coating combining homogeneous layers and linear gradient refractive index layers has been deposited using different techniques. The samples were analysed by optical characterisation based on spectrophotometric and spectroscopic ellipsometric measurements under different angles of incidence in order to precisely characterise the coatings. The Lorentz-Lorenz model has been used for calculation of refractive index of material mixtures in gradient index layers as well as some homogenous parts of the coating. The obtained refractive index profiles have been compared with the targeted ones to detect errors in processes of deposition.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
Citiraj ovu publikaciju:
Časopis indeksira:
- Current Contents Connect (CCC)
- Web of Science Core Collection (WoSCC)
- Science Citation Index Expanded (SCI-EXP)
- SCI-EXP, SSCI i/ili A&HCI
- Scopus
- MEDLINE
