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Pregled bibliografske jedinice broj: 276198

SPUTTER-DEPOSITED AMORPHOUS-LIKE TUNGSTEN

Radić, Nikola; Tonejc, Antun; Ivkov, Jovica; Dubček, Pavo; Bernstorff, Sigrid; Medunić, Zvonko
SPUTTER-DEPOSITED AMORPHOUS-LIKE TUNGSTEN, 2004. (izvještaj).

CROSBI ID: 276198 Za ispravke kontaktirajte CROSBI podršku putem web obrasca

Naslov
SPUTTER-DEPOSITED AMORPHOUS-LIKE TUNGSTEN

Autori
Radić, Nikola ; Tonejc, Antun ; Ivkov, Jovica ; Dubček, Pavo ; Bernstorff, Sigrid ; Medunić, Zvonko

Izvornik
IBR Elettra Annual Report 2003 Austro SAXS

Vrsta, podvrsta
Ostale vrste radova, izvještaj

Godina
2004

Ključne riječi
tungsten; sputtering; amorphous

Sažetak
The sputter-deposited films tend to have high residual stress, which changes from strongly compressive to tensile with increasing working gas pressure. Simultaneously, phase composition of tungsten films changes from predominantly  -W form to  -W modification. The formation and stabilization of  -W in case of sputter-deposited tungsten films is attributed to the incorporation of oxygen in the film.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA

Projekti:
0035008
0098020
0119252
0098021

Ustanove:
Institut za fiziku, Zagreb,
Institut "Ruđer Bošković", Zagreb,
Prirodoslovno-matematički fakultet, Zagreb

Profili:

Avatar Url Zvonko Medunić (autor)

Avatar Url Nikola Radić (autor)

Avatar Url Jovica Ivkov (autor)

Avatar Url Pavo Dubček (autor)

Avatar Url Antun Tonejc (autor)

Citiraj ovu publikaciju:

Radić, Nikola; Tonejc, Antun; Ivkov, Jovica; Dubček, Pavo; Bernstorff, Sigrid; Medunić, Zvonko
SPUTTER-DEPOSITED AMORPHOUS-LIKE TUNGSTEN, 2004. (izvještaj).
Radić, N., Tonejc, A., Ivkov, J., Dubček, P., Bernstorff, S. & Medunić, Z. (2004) SPUTTER-DEPOSITED AMORPHOUS-LIKE TUNGSTEN. IBR Elettra Annual Report 2003 Austro SAXS. Izvještaj.
@unknown{unknown, author = {Radi\'{c}, Nikola and Tonejc, Antun and Ivkov, Jovica and Dub\v{c}ek, Pavo and Bernstorff, Sigrid and Meduni\'{c}, Zvonko}, year = {2004}, keywords = {tungsten, sputtering, amorphous}, title = {SPUTTER-DEPOSITED AMORPHOUS-LIKE TUNGSTEN}, keyword = {tungsten, sputtering, amorphous} }
@unknown{unknown, author = {Radi\'{c}, Nikola and Tonejc, Antun and Ivkov, Jovica and Dub\v{c}ek, Pavo and Bernstorff, Sigrid and Meduni\'{c}, Zvonko}, year = {2004}, keywords = {tungsten, sputtering, amorphous}, title = {SPUTTER-DEPOSITED AMORPHOUS-LIKE TUNGSTEN}, keyword = {tungsten, sputtering, amorphous} }

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