Silicon nanocrystals by thermal annealing of Si-rich silicon oxide prepared by the LPCVD method

Ivanda, Mile; Gebavi, Hrvoje; Ristić, Davor; Furić, Krešimir; Musić, Svetozar; Ristić, Mira; Žonja, Sanja; Biljanović, Petar; Gamulin, Ozren; Balarin, Maja; Montagna, Maurizio; Ferarri, Maurizio; Righini, Giancarlo Cesare

doi:10.1016/j.molstruc.2006.09.036

Pregled bibliografske jedinice broj: 272379

Silicon nanocrystals by thermal annealing of Si-rich silicon oxide prepared by the LPCVD method

Ivanda, Mile; Gebavi, Hrvoje; Ristić, Davor; Furić, Krešimir; Musić, Svetozar; Ristić, Mira; Žonja, Sanja; Biljanović, Petar; Gamulin, Ozren; Balarin, Maja et al.

Silicon nanocrystals by thermal annealing of Si-rich silicon oxide prepared by the LPCVD method // Journal of molecular structure, 834-836 (2007), 461-464 doi:10.1016/j.molstruc.2006.09.036 (međunarodna recenzija, članak, znanstveni)

CROSBI ID: 272379 Za ispravke kontaktirajte CROSBI podršku putem web obrasca

Naslov
Silicon nanocrystals by thermal annealing of Si-rich silicon oxide prepared by the LPCVD method

Autori
Ivanda, Mile ; Gebavi, Hrvoje ; Ristić, Davor ; Furić, Krešimir ; Musić, Svetozar ; Ristić, Mira ; Žonja, Sanja ; Biljanović, Petar ; Gamulin, Ozren ; Balarin, Maja ; Montagna, Maurizio ; Ferarri, Maurizio ; Righini, Giancarlo Cesare

Izvornik
Journal of molecular structure (0022-2860) 834-836 (2007); 461-464

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Si-rich silicon oxide ; LPCVD ; Raman scattering ; low frequency particle modes

Sažetak
The Si-rich silicon oxide (SiO_x)thin films are prepared on silicon crystalline substrates by low pressure chemical vapor deposition (LPCVD) method. The oxigen concentrations x are controlled by the ratio of the partial pressures of N_2O and SiH_4 gases in the reaction chamber. In order to induce the phase separation on SiO_2 and Si nanostructures the samples are annealed at the temperatures 900-1100 ^oC. The structural and optical properties of the samples are investigated by Raman and infrared spectroscopy and scanning electron microscopy.

Izvorni jezik
Engleski

Znanstvena područja
Fizika, Kemija, Elektrotehnika

Napomena
Rad je prezentiran na skupu XXVIIIth European Congress on Molecular Spectroscopy "Molecular Spectroscopy and Molecular Structure", održanom od 03.–08.09.2006.g., Istanbul, Turska.

POVEZANOST RADA

Projekti:
MZO-ZP-036-0982904-1642 - Sofisticirane poluvodičke strukture za komunikacijsku tehnologiju (Koričić, Marko, MZO ) ( CroRIS)
MZOS-098-0982904-2898 - Fizika i primjena nanostruktura i volumne tvari (Ivanda, Mile, MZOS ) ( CroRIS)
MZOS-098-0982904-2952 - Sinteza i mikrostruktura metalnih oksida i oksidnih stakala (Ristić, Mira, MZOS ) ( CroRIS)
MZOS-108-1080134-3105 - Mehanizmi narušavanja strukture lipoproteina djelovanjem vanjskih čimbenika (Gamulin, Ozren, MZOS ) ( CroRIS)