Naslov
Characterization of RF nitrogen plasma by optical emission spectroscopy

Autori
Mozetič, Miran ; Cvelbar, Uroš ; Vesel, Alenka ; Krstulović, Nikša ; Milošević, Slobodan

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
MIDEM Conference 2006 Proceedings / Šorli, Iztok et al - Ljubljana : Society for Microelectronics, Electronic Components and Materials (MIDEM), 2006, 101-106

Skup
42nd International Conference on Microelectronics, devices and materials

Mjesto i datum
Strahinj, Slovenija, 13.09.2006. - 15.09.2006

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
nitrogen discharge; optical emission spectroscopy

Sažetak
Optical emission spectroscopy was applied to study the characteristics of low pressure nitrogen plasma suitable for discharge cleaning of electronic components. Plasma was created in a glass tube with an inductively coupled RF generator with the frequency of 13.56MHz and the output power of 120W. Vacuum system was pumped with a roots and a two stage oil rotational pump. Commercially available nitrogen was leaked into the discharge vessel through a precise leak valve. The pressure during experiments was between 10 and 100 Pa. The electron density and temperature were measured with a double Langmuir probe and were about 1x1016 m-3 and 5eV, respectively. The optical emission spectra were measured with a S2000- Ocean Optics spectrometer. A rich spectrum of nitrogen molecules was observed between 350 and 800nm. The predominant lines were bands corresponding to neutral nitrogen molecular transitions from B3Π g to A3Σ +u states. The bands in this system were most intense in the red part of the spectrum indicating transition to different vibrationally excited states. Transitions between the neutral nitrogen molecule C3Π u excited state to B3Π g excited state were detected in the violet part of the spectrum. These transitions were less intensive indicating a rather poor population of the highly excited C3Π u states. Ionic transition states were also observed. The transitions between the B2Σ +u to X2 Σ +g positively charged molecular ionic states were detected in violet range of the spectra. The results were explained with N2 potential curves.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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