Naslov
Discharge cleaning of porous ceramics

Autori
Vesel, Alenka ; Cvelbar, Uroš ; Mozetič, Miran ; Drenik, Aleksander ; Krstulović, Nikša ; Milošević, Slobodan

Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni

Izvornik
MIDEM Conference 2006 Proceedings / Šorli, Iztok et al - Ljubljana : Society for Microelectronics, Electronic Components and Materials (MIDEM), 2006, 113-118

Skup
42nd International Conference on Microelectronics, devices and materials

Mjesto i datum
Strahinj, Slovenija, 13.09.2006. - 15.09.2006

Vrsta sudjelovanja
Predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
Porous materials; discharge cleaning oxygen plasma; optical emission spectroscopy

Sažetak
Experimental results of the discharge cleaning of porous sintered Al2TiO5 ceramics are presented. The ceramics soaked with a mineral oil was exposed to RF oxygen plasma at the pressure of 75 Pa. Plasma parameters were measured with a Langmuir probe, a catalytic probe and by optical emission spectroscopy. The plasma density was about 2 × 1016 m− 3, the electron temperature was about 6 eV and the density of neutral oxygen atoms was about 2 × 1021 m− 3. Optical emission spectra between 200 and 1, 000 nm were measured continuously during plasma treatment. The CO peak resulting from oil oxidation reached a well-pronounced maximum between 100 and 150 s of plasma treatment. The maximum in CO corresponded well with a minimum in O peaks. Concentration of oil in the samples was estimated by Energy Dispersion X-ray analysis (EDX). Initially the samples showed high concentration of carbon (about 38 at.%), while after plasma treatment the carbon concentration decreased below the detection limit of our EDX device. The cleaning efficiency was explained by diffusion of oil towards the surface where it was removed by oxidation with oxygen radicals.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

POVEZANOST RADA