ࡱ> WYVcy5319 ^bjbj0Slj j j j 6 , tf 4\f bYnj1X3X3X3X3X3X3X$[ 6]WXj &WXH)j j X6H)H)H)j j 1XZFH)1XH) H)2Qj j #V^ O%f %TFEVYHbYTB]%d]#V"H)f f j j j j Comparison of gradient index and classical designs of a narrow band notch filter Vesna Janickia,b, Marc Lappschiesc, Bjrn Grtzc, Detlev Ristauc, Uwe Schallenbergd, Olaf Stenzela, Norbert Kaisera a Fraunhofer Institut fr Angewandte Optik und Feinmechanik, Optical Coatings Department, Albert-Einstein-Str. 7, 07745 Jena, Germany b Ruer Boakovi Institute, Division of Laser and Atomic Research and Development, Bijeni ka cesta 54, 10000 Zagreb, Croatia c Laser Zentrum Hannover e.V., Department of Laser Components, Hollerithallee 8, D-30419 Hannover, Germany d mso jena Mikroschichtoptik GmbH, Carl Zeiss Promenade 10, 07745 Jena, Germany ABSTRACT Rugate structures, as well as gradient refractive index films in general, attract a lot of interest. The gradient index systems may provide advantages in both, optical performance and mechanical properties of the optical coatings. Rugates have shown to be specially interesting for design of notch filters. A lot of theoretical work on design of rugate filters has been done in the last decades. However, only few of the designs could be deposited, which is often caused by practical problems, e.g. preparing materials with the desired refractive index values. In this paper two different gradient refractive index designs are compared to a classical high-low stack. One gradient design is synthesized by an apodized sinusoidal structure that is approximated by homogeneous sublayers. The other one is based on an apodized sinusoidal structure as well, but it is approximated by a hybrid structure, i.e. a combination of linear gradient index ramps between the lowest and the highest refractive index applicable and homogeneous layers of high index values. The two gradient designs take into account the constraints posed by limitations of the real deposition systems. Both designs are compared to a classical high-low stack and the advantages and drawbacks of each approach are commented. Keywords: rugate filters, thin film design, gradient index, mixing layers, notch, band stop filters Introduction Notch filters, also known as minus or band stop filters, are optical components having very low transmittance in a narrow spectral range but a high transmittance elsewhere. They are mainly used in Raman and fluorescence spectroscopy, laser systems and as laser protective coatings. The ideal notch filter would have one hundred percent of reflectance in the required rejection band and zero reflectance outside of this region. The quality of the filters are estimated by their width of the blocking band, the steepness of the transition between rejecting and transmitting region, the thickness of the coating and their optical density OD (that is a measure of the strength of the reflectance peak and defined as negative logarithm of transmittance). For example, the optical density of an ideal notch filter equals 5 in the required rejection band and its reflectance would be zero outside of this region. It is well known that a quarter wave HL stack gives a fundamental stop band, i.e. region of high reflectance, as well as odd harmonic stop bands1. The fundamental stop band is positioned at the wavelength that is equal to four times the layers optical thickness. The bandwidth of the stop band increases with the ratio of the minimal and maximal refractive indices used in the design. A smaller difference of these indices results in a narrower bandwidth, but also in a lower optical density at the same total thickness. Therefore, it is convenient to estimate how many pairs of HL layers of the given materials will be necessary to achieve the desired optical density. The refractive index profile of a quarter wave stack can be understood as a square wave function and thus be represented by a Fourier series. Each term of the series then generates a specific stop band of the transmittance spectrum2. The first term is a sine wave refractive index function that corresponds to the fundamental stop band. This gradient index structure is known as a rugate. It gives the stop band at the same position as the quarter wave stack, but in this case there will be no harmonic stop bands since they are represented by other terms in the series. Continuous gradient index structures like these are known as rugates. The origin of sidelobes is in the mismatch of the equivalent refractive index of the coating and refractive index of the surrounding media. In order to eliminate sidelobes, an amplitude apodization function is applied to the first Fourier term. Quintic (that is polynomial function of the 5th order) or Gaussian apodization were demonstrated to be excellent for this purpose2,3. Additionally, quintic apodized refractive index layers, alone or superimposed to the sine function, can be added to both ends of the structure to finally match its average refractive index to the one of the surrounding media4. However, the sidelobe suppression is very often improved at expense of reflectance in the stop band. Partial apodization applied to only a number of end periods of the rugate can eliminate the sidelobes significantly, maintaining the good optical density. Another solution to preserve a good reflectance would be increasing the number of periods in the filter, since OD increases about linearly with their number5. In this paper three designs of a narrow notch filter centred at the wavelength of 532 nm are presented. One of the designs is a classical HL system. A second is a rugate system synthesized by an apodized sinusoidal structure that is approximated by homogeneous sublayers. The last presented design is a combination of the two first mentioned. It is also based on an apodized sinusoidal shape, but is approximated by a hybrid structure, i.e. a combination of linear gradient index ramps between the lowest and the highest refractive index applicable and homogeneous layers of high index values. 2. METHODOLOGY Generally, designing of a notch filter starts with the choice of the materials that will be suitable for achieving the desired bandwidth of the rejection band and simultaneously satisfy requirements for mechanical stability. Typically, the quarter wave stack is generated having sufficient number of pairs to obtain satisfactory reflectance. One of the following three approaches is normally applied for elimination of sidelobes6: The filter can be designed to have minimum sidelobes in a medium having the refractive index appropriate for simplification of the design, which is then matched to the real surrounding media. Later, the thickness of this dummy medium can be reduced to zero, without effecting the performance of the filter. Another approach is gradual reduction of the thickness of the high index material with respect to the low index material in the outermost periods. In this way also the width of the high reflectance zone can be varied. The third possibility is refinement of the starting quarter wave stack by one of the numerical methods, allowing at first only the outermost layers to be optimised and then gradually increasing the number of layers free to be altered, until the desired performance is achieved. A common approach to the synthesis of rugate filters is based on the inverse Fourier transform relation between a spectral function Q() and the refractive index profile. The spectral function is, in fact, a function of the desired optical performance of the final system. One of the problems of this method is that Q-function is not known exactly, but only its approximate values7-9. The performances of rugate designs presented in this paper were obtained following the classical matrix method based on subdividing the graded index profile into sublayers of corresponding constant refractive indices. Such defined design can then be refined by a numerical optimisation technique. Similarly to the classical optical system synthesis, the deviation of the performance of the model from the desired target values is minimized during the optimisation. 2.1. Specifications and designs The performance of the required notch filter should satisfy the following demands under normal incidence: reflectance (no back side reflections included) should be lower than 10% in the wavelength range 400-515 nm and 550-700 nm, transmittance in the range 530-534 nm should be lower then 0.01% and the total physical thickness of the design should not exceed 10 m significantly. Three different approaches have been applied to model the filter and three different designs were obtained. As substrate material BK7 glass was taken in all three cases. For the sake of clarity in the comparison of the designs, it is assumed that all the materials and the substrate are free of absorption. 2.2. Classical HL design For the multilayer design SiO2 and Ta2O5 were chosen as low and high index materials with refractive indices of 1.473 and 2.153 at 532 nm, respectively. As initial design, a fifth-order stack (5H5L)15 with 15 periods has been set providing both, the desired bandwidth and optical density. This design has a total physical thickness greater than 10 m. Using higher order stop bands it is also possible to set different optical thickness of the H and L layers within the period, whereby the sum of the optical thickness defines both, the bandwidth and the spectral position of the stop bands. In this sense, a stack (3.7H .3L)36 fulfils the requirements for bandwidth, total physical thickness, and optical density, but a lot of sidelobs occurs. Needle optimisation technique was finally applied to this stack to eliminate the sidelobes. 2.3. Rugate design The design is derived analytically, by superposing a sinus-trail of 70 main periods by an apodizing function ( EMBED Equation.3 ), applied to the first 330 layers and ending 180 layers. This forces the apodization to the substrate refractive index. Additionally, this profile is multiplied by a nearly linear function to lift the general mean of the refractive index profile. This lowers the index of refraction range in order to meet the low reflection bandwidth. Using 732 sublayers, the total thickness equals 10.68m. Refractive indices for each sublayer are calculated as a mixture of SiO2 and TiO2 including the material dispersions according to Lorentz theory. 2.4. Hybrid design The hybrid design was obtained utilizing the numerical optimisation software, that was recently developed by Tikhonravov et al10-11, starting from 45 zigzag periods with a refractive index ranging from 1.6 to 1.75 and of total thickness around 7m. During the calculations, each ramp, i.e. linear gradient layer, was subdivided into 9 sublayers of constant refractive index that was calculated as a mixture of SiO2 and Nb2O5 materials following a simple linear equation:  EMBED Equation.3 . (1) Here nH and nL stand for indices of pure materials, i.e. Nb2O5 and SiO2, and ( is approximated by the fraction of the high index material, that can take values between 0 and 1. It was previously experimentally proven that this relation well approximates the refractive index of the mixture of this two materials12. The refractive indices and thickness of each ramp were free to be optimised. Calculations lead to the apodized half-sinusoidal profile (Figure 5). The advantage of numerical optimisation is the possibility to control values of the design parameters, such as refractive index in individual points, thickness or steepness of ramps. For example, due to the limitations of the available deposition technology (the obtained coating is intended to be produced by co-evaporation of the two materials by electron beam guns in a Leybold Syrus Pro 1100 deposition plant), it was preferable to limit the number of ramp end-point refractive index values. Therefore, end refractive indices of periods adjacent to the substrate, as well as those towards air, were fixed at values 1.750 and 1.594, both at the wavelength of 532 nm. The last one was the minimum refractive index assumed to be well reproducible by the deposition system. In the centre of the coating, the high value was fixed at 1.80. Also, due to the technical reasons, it is not possible to obtain arbitrarily steep refractive index gradients. Hence, maximally allowed change in refractive index was 0.5 in 25 nm of thickness. Adding new periods, followed by optimisation of the thickness and final introduction of a SiO2 layer at the end of the design, in order to improve the transmission in the pass bands, led to the final model. 3. RESULTS AND DISCUSSION The resulting HL design is presented in Figure 2. It has 106 layers and total physical thickness of 10.205 m. The individual sublayers range in thickness from 7.6 to 329.1 nm (Figure 1). The thickness of each of layer was changed by the optimisation procedure but, corresponding to the original design approach, most of the thin layers are L layers and most of the thick ones are H layers.  EMBED Origin50.Graph  EMBED Origin50.Graph  Figure 1. Thickness of layers through the HL design. The first layer is adjacent to the substrate. Figure 2. Refractive index profile of HL design. The refractive index in the rugate design ranges from 1.582 to 1.958, at the wavelength of 532 nm. The refractive index profile is shown in Figure 3 and the corresponding reflectance in Figure 4. The performance illustrates the power of rugates to suppress completely sidelobes and ripples even in much wider wavelength range than initially required (400-700 nm). The reflectance out of the rejection band is around 5% to the left of the reflectance peak and 4% to the right and fulfils the requirements (R < 10%). In the other two designs, the target reflectance was defined as 0% in the mentioned transmittance region, so this is why the rugate has higher reflectance there.  EMBED Origin50.Graph  EMBED Origin50.Graph  Figure 3. Refractive index profile of the rugate design. Figure 4. Performance of the rugate model presented at Fig. 3. Transmittance is kept low, without sidelobes and ripples, also far out of the required region. In Figure 5, the apodized profile obtained after free optimisation of refractive indices is presented. The final design is shown in Figure 6. It should be noted that the peak value of refractive index in the hybrid design is often followed not by a ramp but by a layer of constant refractive index, which is the main characteristic of this kind of coatings. The total thickness is 10.667 m. The minimum thickness of a homogeneous mixture layer is 8.78 nm and the minimal thickness of the ramp is 10 nm. Thus, the criteria of maximal change in refractive index of 0.5 in 25 nm of thickness was met in the design.  EMBED Origin50.Graph  EMBED Origin50.Graph  Figure 5. Apodized hybrid design obtained as a result of free optimisation of refractive indices, from an initial design whose indices were 1.6 and 1.75. Figure 6. Final hybrid design, with added SiO2 layer at the end towards the surface. As can be seen in Figure 7, all three designs show very similar reflectance. In order to evaluate and compare them, one should verify their thickness, OD, full width at half maximum (FWHM), etc. The classical HL design has achieved the lowest OD in the reflectance peak region (530-534 nm) and thus the best transmittance at the central wavelength of 532 nm. But at the same time it shows the lowest number of periods and the lowest thickness due to its highest refractive index contrast, compared with the other two designs. It is the characteristic of gradient index designs to require more thickness than the classical HL stack for the same quality of the performance. Steepness of the transition between pass and rejection band is around 1 nm for the change from 20% to 80 %, while FWHM is around 32 nm, for all three models. Comparing the rugate and the hybrid design one can notice wide pass band in the case of the first and slightly better OD and smaller thickness in the case of the second. Due to the simpler refractive index profile, i.e. linear ramps and constant amplitude of the periods, the hybrid design is perhaps less demanding for implementation and production in a deposition system. The results and comparison of presented notch designs are summarised in Table 1. Table 1. Comparison of the notch designs and their performances. HLrugatehybridmaterials (high/low)Ta2O5 / SiO2TiO2 / SiO2Nb2O5 / SiO2contrast of n (nmax - nmin) in the rejection region0.6810.2360.156nmax / nmin @ 532 nm2.153 / 1.4731.958 / 1.5821.800 / 1.594T / R @ 532 nm0.0016 / 99.99840.0118 / 99.98820.0093 / 99.9907FWHM (nm)313332OD4.763.924.01number of periods537066dtotal / dmin10205 / 7.610680.46 / -10666.67 / 8.78naverage @ 532 nm1.9391.7391.685  EMBED Origin50.Graph  Figure 7. Comparison of the calculated reflectance spectra of the three notch designs. 4. CONCLUSIONS Comparison of classical HL, rugate and hybrid notch design, modelled to satisfy the same requirements, showed that the graded index designs need more thickness for the same optical density then the HL stack. However, the advantage of the gradient index approach is better sidelobes and ripple suppression, specially in the case of the rugate design. The hybrid design has simpler refractive index profile compared to the rugate and is easier to adapt to different deposition systems. It is shown that for the set specifications the HL design is more favourable than the rugate approaches. In fact, as a conclusion from the maximum principle13, in the case of normal incidence the optimum design will be the one using only two materials, having maximal possible refractive index contrast. Therefore, regardless of the different materials resulting in slightly different optical constants used for the three designs, it is not astonishing that the HL-stack shows the best optical performance. In the case of oblique incidence, this conclusion holds no more and then gradient index designs may show similar or even better optical properties than their HL-counterparts, as it has been recently demonstrated for the case of omnidirectional broadband AR coatings14. Yet, the advantages that are expected from rugates regardless of the angle of incidence are improved mechanical and tribological properties15,16 and higher laser induced damage threshold17. Acknowledgments The authors acknowledge financial support by BMWA, Germany, in terms of the rugate grant. Vesna Janicki wishes to thank to the Fraunhofer Society in Germany for a Fraunhofer Fellowship at IOF in Jena. REferences A. Macleod, Thin films optical filters, 3rd Ed., pp. 191, Institute of Physics Publishing, Bristol and Philadelphia, 2001. W. H. Southwell, Extended-bandwidth reflector designs by using wavelets, Appl. Opt. 36, 314-318 (1997). W. H. Southwell, Rugate filter sidelobe suppression using quintic and rugated matching layers, Appl. Opt. 28, 2949-2951 (1989). W. H. Southwell, Using apodization function to reduce sidelobes in rugate filters, Appl. Opt. 28, 5091-5094 (1989). R. R. Willey, Practical design and production of thin films, pp. 102, Marcel Dekker, New York, Basel, 2002. A. Macleod, Optical coatings from design through manufacture, pp. 77-78, Thin Film Center Inc., Tucson, 2004. P. G. Verley, J. A. Dobrowolski, Iterative correction process for optical thin film synthesis with Fourier transform method, Appl. Opt. 29, 3672-3684 (1990). B. G. Bovard Rugate filter theory: an overview, Appl. Opt. 32, 5427-5442 (1993). D. Poitras, S. Larouche, L. Martinu, Design and plasma deposition of dispersion-corrected multiband rugate filters, Appl. Opt. 41, 5249-5255 (2002). A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, M. A. Kokarev, N. Kaiser, O. Stenzel, S. Wilbrandt, D. Gbler, New optimisation algorithm for the synthesis of rugate optical coatings, submitted to Appl. Opt. A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, M. A. Kokarev, N. Kaiser, O. Stenzel, S. Wilbrandt, General approach to the synthesis of rugate coatings, Proceedings of VI international conference Prikladnaja Optika, 3, 12-16, 2004. O. Stenzel, S. Wilbrandt, D. Gbler, N. Kaiser, A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, M. A. Kokarev, Refractive indices of SiO2 and Nb2O5 mixture films, Proceedings of VI international conference Prikladnaja Optika, 3, 34-38, 2004. Alexander V. Tikhonravov Some theoretical aspects of thin-film optics and their applications, App. Opt. 32, 5417 - 5426 (1993). V. Janicki, S. Willbrandt, O. Stenzel, D. Gbler, N. Kaiser, A. Tikhonravov, M. Trubetskov, T. Amotchkina, Hybrid optical coating design for omnidirectional antireflection purposes, J. Opt. A: Pure Appl. Opt. 7, L1-L4 (2005). D. Rats, D. Poitras, J. M. Soro, L. Martinu, J. von Stebut, Mechanical properties of plasma-deposited silicon-based inhomogeneous optical coatings, Surf. Coat. Technol. 111, 220-228 (1999). R. Vernhes, O. Zabeida, J. E. Klemberg-Sapieha, L. Martinu, Single materal inhomogeneous optical filters based on microstructural gradients in plasma-deposited silicon-nitride, Appl. Opt. 43, 97-103 (2004). D. Ristau et al. 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MSOthickness_B  7@fffffS@ffffff-@[@ffffff+@)@i@fffff_@̌k@33333_@fffffj@fffff_@k@ffffff^@l@333333l@33333_@ffffff2@h@)@j@@@@A@B@C@D@E@F@G@H@I@J@K@L@M@N@O@P@P@Q@Q@R@R@S@S@T@T@U@U@V@V@W@W@X@X@Y@Y@Z@Z@ s ` !a55?? MSOthickness_D  !@333338@33333cb@YG@yW@>@333333+@+@3@1@fffff2@ffffff6@3333331@333336@9@fffff@@>@0b@F@f@:@?@:@333333-@t@fffff&N@ffffff7@>@YR  l "&/ g 3J@=8Of{@$ >>XT  l "&/ g #eP?$X?(i>>3D ( 4ieP?$X?(i i GB33pv??m->Rbv?&>&- m?GĮ76Č ??DDD???EEF4bF! G EEEv??m->v?&>&- m?GĮ76Č ?$@@ g =w^/Xh@$ >>D@YL  $&z q optical thickness (nm) g YJ@S*I$>>BXB  $&q  number of layer g # 5O A?ݪ(">>__BCO2 ( %"A?ݪ(" "  ??? @ @@  @ g ?>>_203  `>@?2, g `]S?y?>>_232  ? " 2,  5` !a?#? 2,??  5` !a?#? 2,??   y$$e P   /$e P  Q@ P  @e P    P  @$$x@ P    P    P  v@;O P  @O$e P    P  @$eZ@ P   P   P   P   P   P   P @ ResultsLog    6 :%BA>%BA      >ObjInfoContentsE_1182525281 ac(@=@!#!Ole CPYA 4.2659 303# ' XtF@ s !?? MSOn530nm_d0  7@7@fffff&@@fffff&@@\@\@33333a@33333a@b@b@fffffr@fffffr@̔y@̔y@|@|@33333[}@33333[}@@@@@@@`@`@͉@͉@fffff@fffff@,@,@@@֒@֒@Ӕ@Ӕ@@@33333s@33333s@̾@̾@33333@33333@fffff@fffff@s@s@fffff@fffff@fffffO@fffffO@|@|@<@<@o@o@3@3@u@u@33333u@33333u@̲@̲@fffffץ@fffffץ@@@fffff@fffff@fffff@fffff@@@j@j@ @ @?@?@33333@33333@33333B@33333B@fffff@fffff@@@3333@3333@L@L@fffffi@fffffi@@@IJ@IJ@ffff@ffff@L{@L{@3333@3333@F@F@fffffش@fffffش@`@`@3333@3333@33333<@33333<@F@F@33333'@33333'@LK@LK@L@L@3333@3333@@@@@@@@@3333ڹ@3333ڹ@33333@33333@L%@L%@:@:@33333ǻ@33333ǻ@@@ռ@ռ@33333@33333@@@3333Ž@3333Ž@@@fffff@fffff@Ծ@Ծ@b@b@33333@33333@ @ @@@33333*@33333*@Y@Y@@a@@a@@@@@̌S@̌S@ _@ _@ffff&@ffff&@@@ffffQ@ffffQ@YZ@YZ@@@ffff@ffff@@@̌@̌@Y@Y@̌7@̌7@ffff&v@ffff&v@fffff~@fffff~@3333@3333@@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t s !a?? MSOn530nm_n0  hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@DA?DA?hej<@hej<@d?d?\U]<@\U]<@d?d?,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t MSOng]u`uLINE FdXX3>BA3>BA  |@@@?gfffff?gfffff@?88ol "$c!fS2? ף= ף=Pd1 g 4 xg O#,T@$?$ >>@YR  l "&/ g 3|@}@$ >>XT  l "&/ g r i_$?$ >>D@YL  $&q n g |@՛?$>>BXB  $& q  thickness (nm) g # \n&?*]aL?(i>>3D ( i&?*]aL?(i i GB33pv??m->Rbv?&>&- m?GĮ76Č ??DDD???EEF4bF! G EEEv??m->v?&>&- m?GĮ76Č ?$@@ g #, m#'T?K`m?(">>__BCO2 ( %"m#'T?K`m?(" "  ??? @ @@  @ g C.?>>_202  ?  2,  !a"?  2,??   h$c P   $<c P  @Z P  @cgfffff? P   ? P  @$$gfffff@ P    P   q P  v@&M P  @M$c P   ? P  @$c|@ P   P   P   P   P   P   P ObjInfoContents_1182591579ac(@=(!+!Ole CPYA 4.2659 303# ' XtF@ s !?? LZHn_d0 l9 p= S@p= S@{G_@{G_@p= a@p= a@)\e@)\e@= ףpi@= ףpi@Qk@Qk@)\m@)\m@fffffo@fffffo@(\p@(\p@Qs@Qs@Hzt@Hzt@)\v@)\v@(\w@(\w@x@x@Qy@Qy@)\z@)\z@Gz{@Gz{@\(}@\(}@= ףp~@= ףp~@ףp= @ףp= @(\@(\@Gzf@Gzf@(\@(\@Qb@Qb@(\@(\@\(^@\(^@Hzۃ@Hzۃ@(\Y@(\Y@33333ׄ@33333ׄ@(\U@(\U@GzR@GzR@\(І@\(І@p= M@p= M@ףp= ˇ@ףp= ˇ@HzG@HzG@fffff@@fffff@@ףp= @ףp= @Gz:@Gz:@Q@Q@333335@333335@{G᲋@{G᲋@\(0@\(0@̬@̬@(@(@\(@\(@\(@\(@Q@Q@Q@Q@Gz@Gz@(\E@(\E@@@33333@33333@)\@)\@ ףp==@ ףp==@Qz@Qz@p= ׶@p= ׶@@@q= ף0@q= ף0@Gzn@Gzn@R뫒@R뫒@@@(@(@Hze@Hze@̢@̢@Qߓ@Qߓ@(\@(\@33333W@33333W@\(@\(@Qϔ@Qϔ@fffff @fffff @I@I@= ףp@= ףp@ŕ@ŕ@Gz@Gz@Q>@Q>@zGz@zGz@Gz@Gz@Gz@Gz@q= ף+@q= ף+@Qg@Qg@q= ף@q= ף@Q@Q@Q@Q@(\Z@(\Z@zG@zG@Ә@Ә@{G @{G @33333H@33333H@Q@Q@Q@Q@Q@Q@Gz3@Gz3@Ro@Ro@Hz@Hz@ ףp=@ ףp=@Q%@Q%@Gz`@Gz`@Q@Q@Qӛ@Qӛ@(\ @(\ @(\F@(\F@Q@Q@@@@@Q4@Q4@(\p@(\p@q= ף@q= ף@{G@{G@Gz@Gz@W@W@ףp= @ףp= @RȞ@RȞ@Hz@Hz@= ףp=@= ףp=@y@y@{Gᴟ@{Gᴟ@= ףp@= ףp@ףp=@ףp=@zG2@zG2@)\uN@)\uN@Qj@Qj@q= #@q= #@ ףp=@ ףp=@p= ׾@p= ׾@ܠ@ܠ@@@p= W@p= W@(4@(4@{GQ@{GQ@(\Bn@(\Bn@(\@(\@Q@Q@G@G@zܡ@zܡ@q= #@q= #@Q@Q@ףp=3@ףp=3@GzQ@GzQ@(\n@(\n@Gz@Gz@@@Q¢@Q¢@Qݢ@Qݢ@(\@(\@L@L@= ףp0@= ףp0@ ףp=M@ ףp=M@j@j@(܇@(܇@ffff椣@ffff椣@Q@Q@Qݣ@Qݣ@@@(@(@3333-@3333-@I@I@Gd@Gd@q= ף@q= ף@(\ž@(\ž@= ף@= ף@(\ؤ@(\ؤ@R@R@L@L@(\+@(\+@QE@QE@`@`@33333{@33333{@Q@Q@(\@(\@ףp=Х@ףp=Х@(\@(\@Hz. @Hz. @Gz&@Gz&@Hz.A@Hz.A@q= ף[@q= ף[@p= u@p= u@Q8@Q8@\(@\(@(Ʀ@(Ʀ@L@L@(\@(\@Gz9@Gz9@q= #U@q= #U@Go@Go@Hz.@Hz.@\(@\(@(\@(\@\(٧@\(٧@z@z@q= #@q= #@= ף-@= ף-@HzJ@HzJ@Rf@Rf@(\@(\@)\@)\@= ף@= ף@QШ@QШ@z@z@Gz@Gz@Q!@Q!@Q=@Q=@ףp= Z@ףp= Z@\v@\v@Q@Q@= ף@= ף@Qȩ@Qȩ@@@Q@Q@\@\@L0@L0@K@K@(\h@(\h@3333@3333@Q8@Q8@Q@Q@\(ت@\(ت@p= W@p= W@= ף @= ף @Rk%@Rk%@zG?@zG?@{GY@{GY@{Gau@{Gau@Q@Q@33333@33333@ʫ@ʫ@(\@(\@Q8@Q8@ ףp=@ ףp=@33334@33334@GzN@GzN@{Gg@{Gg@)\u@)\u@)\@)\@Hz.@Hz.@Q֬@Q֬@Q@Q@q= ף@q= ף@p= W)@p= W)@33333C@33333C@ףp=\@ףp=\@p= u@p= u@@@Hz.@Hz.@Hzŭ@Hzŭ@ffff@ffff@{Ga@{Ga@@@6@6@\P@\P@{Gaj@{Gaj@Q@Q@(ܜ@(ܜ@Q@Q@ ףp=Ѯ@ ףp=Ѯ@z@z@ @ @= ףp%@= ףp%@GzA@GzA@)\\@)\\@{Gaw@{Gaw@G@G@q= #@q= #@(\ï@(\ï@Qݯ@Qݯ@(\@(\@\ @\ @Q@Q@G%@G%@(\4@(\4@q= ףA@q= ףA@ףp=N@ףp=N@ףp=[@ףp=[@p= h@p= h@= ףt@= ףt@Gz@Gz@R뎰@R뎰@Q@Q@p= ת@p= ת@z@z@Qǰ@Qǰ@p= ԰@p= ԰@= ף@= ף@fffff@fffff@R@R@Q@Q@Hzn@Hzn@!@!@{G/@{G/@(\=@(\=@HzK@HzK@{GY@{GY@fffffg@fffffg@= ףpt@= ףpt@@@@@33333@33333@q= #@q= #@ףp=@ףp=@q= c±@q= c±@Qб@Qб@Rޱ@Rޱ@Gz@Gz@ @ @ףp= @ףp= @R@R@ffff& @ffff& @(\,@(\,@Q9@Q9@\(G@\(G@ףp= U@ףp= U@Qq@Qq@= ף0@= ף0@(@(@(\@(\@\(@\(@q= ף@q= ף@QE@QE@(\B̲@(\B̲@ ףpٲ@ ףpٲ@ffff@ffff@@@Hz@Hz@Q@Q@ffff&@ffff&@,@,@ffff8@ffff8@{G!E@{G!E@zQ@zQ@(\^@(\^@Ql@Ql@(\Bz@(\Bz@Rk@Rk@z@z@GzT@GzT@R@R@̌@̌@Q˳@Q˳@(׳@(׳@ףp=J@ףp=J@Q^@Q^@R@R@q= @q= @(\@(\@ffff&)@ffff&)@R6@R6@Q8D@Q8D@Q@Q@Q]@Q]@Qj@Qj@Gzv@Gzv@3333@3333@ףp=@ףp=@z@z@3333@3333@QŻ@QŻ@ɴ@ɴ@ִ@ִ@(\@(\@p= @p= @p= @p= @GzT @GzT @ ףp}@ ףp}@Q$@Q$@q= #2@q= #2@(\O@@(\O@@(\N@(\N@ \@ \@(\Bi@(\Bi@ףp= v@ףp= v@(\@(\@@@Gzԛ@Gzԛ@Q@Q@= ף@= ף@ ףpĵ@ ףpĵ@Rҵ@Rҵ@3333@3333@@@z@z@z@z@ףp= @ףp= @!@!@Q^.@Q^.@(;@(;@QI@QI@q= cW@q= cW@(\e@(\e@s@s@Hz.@Hz.@(\O@(\O@z@z@z@z@@@ffff@ffff@Hz.ζ@Hz.ζ@Hz۶@Hz۶@Q@Q@= ף0@= ף0@R+@R+@ ףp@ ףp@Gz @Gz @Q-@Q-@(\:@(\:@(\F@(\F@HznS@HznS@`@`@ףp=n@ףp=n@ffff|@ffff|@ъ@ъ@QŘ@QŘ@L@L@Y@Y@(\@(\@ ףp}̷@ ףp}̷@(\ٷ@(\ٷ@)\@)\@Q@Q@q= #@q= #@(\B@(\B@Rk@Rk@p= W+@p= W+@p= 8@p= 8@E@E@ ףp}R@ ףp}R@Q^@Q^@(\k@(\k@x@x@ffff慸@ffff慸@@@{Gᡸ@{Gᡸ@z@z@R뽸@R뽸@Q^˸@Q^˸@p= Wظ@p= Wظ@)\@)\@= ףp@= ףp@(\@(\@z @z @Gz@Gz@Q^&@Q^&@Q4@Q4@ffffB@ffffB@(\P@(\P@R]@R]@(j@(j@)\uw@)\uw@= ף@= ף@Gz@Gz@p= @p= @Gz@Gz@@@\(ǹ@\(ǹ@zGչ@zGչ@(@(@Qx@Qx@Q^@Q^@= ף @= ף @Rk@Rk@Gz#@Gz#@{G!0@{G!0@\=@\=@(K@(K@zY@zY@q= g@q= g@Hzu@Hzu@@@Qޏ@Qޏ@Hzn@Hzn@R먺@R먺@(@(@3333º@3333º@QEк@QEк@@޺@@޺@Rk@Rk@(\@(\@(\B@(\B@̌@̌@{Ga"@{Ga"@R.@R.@Rk;@Rk;@q= #H@q= #H@QEU@QEU@{Gb@{Gb@q= p@q= p@(\@(\@{G!@{G!@ٚ@ٚ@p= @p= @q= 㴻@q= 㴻@Rk@Rk@Hzͻ@Hzͻ@Rڻ@Rڻ@p= @p= @ ףp}@ ףp}@Q@Q@3333@3333@@@Hzn-@Hzn-@{G:@{G:@fffffG@fffffG@Hzn`@Hzn`@)\5m@)\5m@Rkz@Rkz@(@(@\(@\(@GzT@GzT@Y@Y@ ףp@ ףp@ffff&ͼ@ffff&ͼ@q= ټ@q= ټ@q= c@q= c@R@R@G@G@G @G @)\µ@)\µ@z(@z(@33336@33336@3333D@3333D@̌R@̌R@R_@R_@{Gal@{Gal@{Gx@{Gx@Hzn@Hzn@QE@QE@(\@(\@Q@Q@\h@\h@Gzɽ@Gzɽ@̌׽@̌׽@(@(@= ף0@= ף0@Q@Q@(\ @(\ @R@R@ףp=$@ףp=$@{G!2@{G!2@Hz?@Hz?@ףp= N@ףp= N@33333\@33333\@q= #j@q= #j@\w@\w@3333@3333@Y@Y@Gzԝ@Gzԝ@\h@\h@Q@Q@3333ľ@3333ľ@zҾ@zҾ@\@\@(\@(\@Q@Q@33333 @33333 @33333@33333@Gz#@Gz#@(\O0@(\O0@\<@\<@(I@(I@zGW@zGW@ffff&e@ffff&e@ףp=Js@ףp=Js@= ףp@= ףp@Q@Q@(\œ@(\œ@Q@Q@GzT@GzT@¿@¿@3333sϿ@3333sϿ@= ףpܿ@= ףpܿ@\@\@@@ ףp@ ףp@(\ @(\ @ ףp@ ףp@@@R+@R+@Gz$@Gz$@(*@(*@1@1@Q7@Q7@(\>@(\>@)\UE@)\UE@HznL@HznL@{GS@{GS@HznZ@HznZ@{G!a@{G!a@g@g@Rm@Rm@33333t@33333t@z@z@(\"@(\"@(\@(\@= ף@= ף@ @ @ @ @ @ @@@G:@G:@= ף@= ף@{G@{G@RK@RK@\@\@{G@{G@R@R@@@q= @q= @3333@3333@\@\@ףp=*@ףp=*@ףp=@ףp=@ffff@ffff@Q^@Q^@ףp= @ףp= @= ף@= ף@ffff#@ffff#@(\/*@(\/*@RK1@RK1@@8@@8@ ףp>@ ףp>@\E@\E@p= K@p= K@fffffR@fffffR@3333X@3333X@3333_@3333_@ףp=f@ףp=f@m@m@u@u@Q%|@Q%|@{G!@{G!@ףp=@ףp=@Q@Q@z@z@Hz@Hz@33333@33333@\@\@Gz@Gz@zG@zG@\@\@@@Q@Q@@@Q@Q@(\@(\@Gz@Gz@QX@QX@RK@RK@(\o@(\o@p= @p= @\ @\ @ףp=J@ףp=J@zg@zg@GZ"@GZ"@R+)@R+)@/@/@)\µ6@)\µ6@ ףp=@ ףp=@= ףD@= ףD@(\K@(\K@LS@LS@3333Z@3333Z@\b@\b@@i@@i@Qp@Qp@zGw@zGw@1~@1~@ffff&@ffff&@Q8@Q8@q@q@(\Ϛ@(\Ϛ@ffffF@ffffF@q= é@q= é@33333@33333@z@z@Q@Q@@@G@G@{G!@{G!@`@`@{G@{G@@@@@3333@3333@ףp=j@ףp=j@Gz@Gz@ףp=j @ףp=j @ףp=@ףp=@G@G@zg@zg@&@&@Hz..@Hz..@p= 5@p= 5@p= W=@p= W=@ffffE@ffffE@p= L@p= L@`T@`T@[@[@q= ׃c@q= ׃c@Qr@Qr@(\z@(\z@R@R@GZ@GZ@G@G@q= @q= @Hz@Hz@3333s@3333s@(\/@(\/@(\@(\@둿@둿@(\B@(\B@G@G@ ףp@ ףp@Hz@Hz@zg@zg@zG@zG@\(@\(@ffff@ffff@@@p= @p= @̌@̌@q= c@q= c@@%@@%@(\"-@(\"-@R 5@R 5@<@<@RT@RT@Gl@Gl@̌t@̌t@|@|@)\u@)\u@Hzn@Hzn@zg@zg@)\U@)\U@ffffF@ffffF@G:@,t,t,t,t,t,t s !a?? 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P  @$d|@ P   P   P   P   P   P   P ObjInfoContents_1182582813 ac(@=`;>!HA!Ole       !"#$%&'()*+,-./0123456789:;<=@ABCDEFGHIJKLMNOPQRSTUVWXYZ[\]^_`abefghijklmnopqrstuvwxyz{|}~CPYA 4.2659 303# ' XtF@ s !?? 0LZHev_l0 ' u@fffffu@ v@33333#v@9v@Pv@ffffffv@|v@33333v@v@v@fffffv@v@33333w@w@0w@fffffFw@\w@33333sw@w@w@fffffw@w@33333w@w@x@fffff&x@@I@T@`@33333k@fffffv@@̌@@33333@fffff@@Ă@Ђ@33333ۂ@fffff@@@@33333@fffff@)@4@@@33333K@fffffV@a@l@x@33333@fffff@@̤@@33333@fffffƃ@у@܃@@33333@fffff@ @@ @33333+@fffff6@A@L@X@33333c@fffffn@y@̄@@33333@fffff@@̼@Ȅ@33333ӄ@fffffބ@@@@33333 @fffff@!@,@8@33333C@fffffN@Y@d@p@33333{@fffff@@̜@@33333@fffff@Ʌ@ԅ@@33333@fffff@@ @@33333#@fffff.@9@D@P@33333[@ffffff@q@|@@33333@fffff@@̴@@33333ˆ@fffffֆ@@@@33333@fffff@@$@0@33333;@fffffF@Q@\@h@33333s@fffff~@@̔@@33333@fffff@@̇@؇@33333@fffff@@@@33333@fffff&@1@<@H@33333S@fffff^@i@t@@33333@fffff@@̬@@33333È@fffffΈ@و@@@33333@fffff@@@(@333333@fffff>@I@T@`@33333k@fffffv@@̌@@33333@fffff@@ĉ@Љ@33333ۉ@fffff@@@@33333@fffff@)@4@@@33333K@fffffV@a@l@x@33333@fffff@@̤@@33333@fffffƊ@ъ@܊@@33333@fffff@ @@ @33333+@fffff6@A@L@X@33333c@fffffn@y@̄@@33333@fffff@@̼@ȋ@33333Ӌ@fffffދ@@@@33333 @fffff@!@,@8@33333C@fffffN@Y@d@p@33333{@fffff@@̜@@33333@fffff@Ɍ@Ԍ@@33333@fffff@@ @@33333#@fffff.@9@D@P@33333[@ffffff@q@|@@33333@fffff@@̴@@33333ˍ@fffff֍@@@@33333@fffff@@$@0@33333;@fffffF@Q@\@h@33333s@fffff~@@̔@@33333@fffff@@̎@؎@33333@fffff@@@@33333@fffff&@1@<@H@33333S@fffff^@i@t@@33333@fffff@@̬@@33333Ï@fffffΏ@ُ@@@33333@33333@@fffff@@@33333@$@fffff*@0@5@33333;@@@fffffF@L@Q@33333W@\@fffffb@h@m@33333s@x@fffff~@@@33333@̔@fffff@@@33333@̰@fffff@@@33333ǐ@̐@fffffҐ@ؐ@ݐ@33333@@fffff@@@33333@@fffff @@@33333@ @fffff&@,@1@333337@<@fffffB@H@M@33333S@X@fffff^@d@i@33333o@t@fffffz@@@33333@̐@fffff@@@33333@̬@fffff@@@33333Ñ@ȑ@fffffΑ@ԑ@ّ@33333ߑ@@fffff@@@33333@@fffff@ @@33333@@fffff"@(@-@333333@8@fffff>@D@I@33333O@T@fffffZ@`@e@33333k@p@fffffv@|@@33333@̌@fffff@@@33333@̨@fffff@@@33333@Ē@fffffʒ@В@Ւ@33333ے@@fffff@@@33333@@fffff@@ @33333@@fffff@$@)@33333/@4@fffff:@@@E@33333K@P@fffffV@\@a@33333g@l@fffffr@x@}@33333@̈@fffff@@@33333@̤@fffff@@@33333@@fffffƓ@̓@ѓ@33333ד@ܓ@fffff@@@33333@@fffff@@ @33333@@fffff@ @%@33333+@0@fffff6@<@A@33333G@L@fffffR@X@]@33333c@h@fffffn@t@y@33333@̄@fffff@@@33333@̠@fffff@@@33333@̼@fffff”@Ȕ@͔@33333Ӕ@ؔ@fffffޔ@@@33333@@fffff@@@33333 @@fffff@@!@33333'@,@fffff2@8@=@33333C@H@fffffN@T@Y@33333_@d@fffffj@p@u@33333{@̀@fffff@@@33333@̜@fffff@@@33333@̸@fffff@ĕ@ɕ@33333ϕ@ԕ@fffffڕ@@@33333@@fffff@@@33333@ @fffff@@@33333#@(@fffff.@4@9@33333?@D@fffffJ@P@U@33333[@`@ffffff@l@q@33333w@|@fffff@@@33333@̘@fffff@@@33333@̴@fffff@@Ŗ@33333˖@Ж@fffff֖@ܖ@@33333@@fffff@@@33333@@fffff@@@33333@$@fffff*@0@5@33333;@@@fffffF@L@Q@33333W@\@fffffb@h@m@33333s@x@fffff~@@@33333@̔@fffff@@@33333@̰@fffff@@@33333Ǘ@̗@fffffҗ@ؗ@ݗ@33333@@fffff@@@33333@@fffff @@@33333@ @fffff&@,@1@333337@<@fffffB@H@M@33333S@X@fffff^@d@i@33333o@t@fffffz@@@33333@̐@fffff@@@33333@̬@fffff@@@33333Ø@Ș@fffffΘ@Ԙ@٘@33333ߘ@@fffff@@@33333@@fffff@ @@33333@@fffff"@(@-@333333@8@fffff>@D@I@33333O@T@fffffZ@`@e@33333k@p@fffffv@|@@33333@̌@fffff@@@33333@̨@fffff@@@33333@ę@fffffʙ@Й@ՙ@33333ۙ@@fffff@@@33333@@fffff@@ @33333@@fffff@$@)@33333/@4@fffff:@@@E@33333K@P@fffffV@\@a@33333g@l@fffffr@x@}@33333@̈@fffff@@@33333@̤@fffff@@@33333@@fffffƚ@̚@њ@33333ך@ܚ@fffff@@@33333@@fffff@@ @33333@@fffff@ @%@33333+@0@fffff6@<@A@33333G@L@fffffR@X@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t s !a??u LZHev_rLZH0 ' (c@,@ N`:@9$@@ ,hH@@#@@N@ g@K@{@P@p@)@0\q@ Ya=@`;rj@Pj/b@~@pRc@`kթ@PA@`yڋ@*_jm@Χ~@ @0J|IN@(@оG@"GI@ (i@3B@`%-@,~@O@Y@`?Z@ 0@544@0-;,i@^2q@:@4lJh@ "/@XKw@rb3@"@88@@%@p]@ D2@r@@:@0,*=F@ x@lY.{@ C@0{@P+/ /@Uu@pK?X@{#6X@/KRX@tX@w-!tX@ z^X@ȁX@!@GX@% X@_s`^X@ RX@YW@]gF>O@HoI@@0B4@@,t?36?WQ?on?@Ab{?Xa$ @F[k@2@8Z@ B(Yc @@v@5 @ - @`|m@Р)C^@ %@-!@k-@@_*@ɹ^@05JMA@Nǭ,@@@LŘ@H.@M@btq@0K|@0H'p@W4@$~ @е:F@/]@rҠ E@D8@08`@`\@eX{@t @P? 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P  @$c|@ P   P   P   P   P   P   P ObjInfo')Contents1Table]SummaryInformation(,      !"#$%&'()*+,-./0123456789:;<=>?@ABCDEFGHIJKLMNOPQRSTUVWXYZ[\]^_`abcdefghijklmnopqrstuvwxyz{|}~CPYA 4.2659 303# ' BB0XtF@ s !??# LZHev_l ' u@fffffu@ v@33333#v@9v@Pv@ffffffv@|v@33333v@v@v@fffffv@v@33333w@w@0w@fffffFw@\w@33333sw@w@w@fffffw@w@33333w@w@x@fffff&x@@I@T@`@33333k@fffffv@@̌@@33333@fffff@@Ă@Ђ@33333ۂ@fffff@@@@33333@fffff@)@4@@@33333K@fffffV@a@l@x@33333@fffff@@̤@@33333@fffffƃ@у@܃@@33333@fffff@ @@ @33333+@fffff6@A@L@X@33333c@fffffn@y@̄@@33333@fffff@@̼@Ȅ@33333ӄ@fffffބ@@@@33333 @fffff@!@,@8@33333C@fffffN@Y@d@p@33333{@fffff@@̜@@33333@fffff@Ʌ@ԅ@@33333@fffff@@ @@33333#@fffff.@9@D@P@33333[@ffffff@q@|@@33333@fffff@@̴@@33333ˆ@fffffֆ@@@@33333@fffff@@$@0@33333;@fffffF@Q@\@h@33333s@fffff~@@̔@@33333@fffff@@̇@؇@33333@fffff@@@@33333@fffff&@1@<@H@33333S@fffff^@i@t@@33333@fffff@@̬@@33333È@fffffΈ@و@@@33333@fffff@@@(@333333@fffff>@I@T@`@33333k@fffffv@@̌@@33333@fffff@@ĉ@Љ@33333ۉ@fffff@@@@33333@fffff@)@4@@@33333K@fffffV@a@l@x@33333@fffff@@̤@@33333@fffffƊ@ъ@܊@@33333@fffff@ @@ @33333+@fffff6@A@L@X@33333c@fffffn@y@̄@@33333@fffff@@̼@ȋ@33333Ӌ@fffffދ@@@@33333 @fffff@!@,@8@33333C@fffffN@Y@d@p@33333{@fffff@@̜@@33333@fffff@Ɍ@Ԍ@@33333@fffff@@ @@33333#@fffff.@9@D@P@33333[@ffffff@q@|@@33333@fffff@@̴@@33333ˍ@fffff֍@@@@33333@fffff@@$@0@33333;@fffffF@Q@\@h@33333s@fffff~@@̔@@33333@fffff@@̎@؎@33333@fffff@@@@33333@fffff&@1@<@H@33333S@fffff^@i@t@@33333@fffff@@̬@@33333Ï@fffffΏ@ُ@@@33333@33333@@fffff@@@33333@$@fffff*@0@5@33333;@@@fffffF@L@Q@33333W@\@fffffb@h@m@33333s@x@fffff~@@@33333@̔@fffff@@@33333@̰@fffff@@@33333ǐ@̐@fffffҐ@ؐ@ݐ@33333@@fffff@@@33333@@fffff @@@33333@ @fffff&@,@1@333337@<@fffffB@H@M@33333S@X@fffff^@d@i@33333o@t@fffffz@@@33333@̐@fffff@@@33333@̬@fffff@@@33333Ñ@ȑ@fffffΑ@ԑ@ّ@33333ߑ@@fffff@@@33333@@fffff@ @@33333@@fffff"@(@-@333333@8@fffff>@D@I@33333O@T@fffffZ@`@e@33333k@p@fffffv@|@@33333@̌@fffff@@@33333@̨@fffff@@@33333@Ē@fffffʒ@В@Ւ@33333ے@@fffff@@@33333@@fffff@@ @33333@@fffff@$@)@33333/@4@fffff:@@@E@33333K@P@fffffV@\@a@33333g@l@fffffr@x@}@33333@̈@fffff@@@33333@̤@fffff@@@33333@@fffffƓ@̓@ѓ@33333ד@ܓ@fffff@@@33333@@fffff@@ @33333@@fffff@ @%@33333+@0@fffff6@<@A@33333G@L@fffffR@X@]@33333c@h@fffffn@t@y@33333@̄@fffff@@@33333@̠@fffff@@@33333@̼@fffff”@Ȕ@͔@33333Ӕ@ؔ@fffffޔ@@@33333@@fffff@@@33333 @@fffff@@!@33333'@,@fffff2@8@=@33333C@H@fffffN@T@Y@33333_@d@fffffj@p@u@33333{@̀@fffff@@@33333@̜@fffff@@@33333@̸@fffff@ĕ@ɕ@33333ϕ@ԕ@fffffڕ@@@33333@@fffff@@@33333@ @fffff@@@33333#@(@fffff.@4@9@33333?@D@fffffJ@P@U@33333[@`@ffffff@l@q@33333w@|@fffff@@@33333@̘@fffff@@@33333@̴@fffff@@Ŗ@33333˖@Ж@fffff֖@ܖ@@33333@@fffff@@@33333@@fffff@@@33333@$@fffff*@0@5@33333;@@@fffffF@L@Q@33333W@\@fffffb@h@m@33333s@x@fffff~@@@33333@̔@fffff@@@33333@̰@fffff@@@33333Ǘ@̗@fffffҗ@ؗ@ݗ@33333@@fffff@@@33333@@fffff @@@33333@ @fffff&@,@1@333337@<@fffffB@H@M@33333S@X@fffff^@d@i@33333o@t@fffffz@@@33333@̐@fffff@@@33333@̬@fffff@@@33333Ø@Ș@fffffΘ@Ԙ@٘@33333ߘ@@fffff@@@33333@@fffff@ @@33333@@fffff"@(@-@333333@8@fffff>@D@I@33333O@T@fffffZ@`@e@33333k@p@fffffv@|@@33333@̌@fffff@@@33333@̨@fffff@@@33333@ę@fffffʙ@Й@ՙ@33333ۙ@@fffff@@@33333@@fffff@@ @33333@@fffff@$@)@33333/@4@fffff:@@@E@33333K@P@fffffV@\@a@33333g@l@fffffr@x@}@33333@̈@fffff@@@33333@̤@fffff@@@33333@@fffffƚ@̚@њ@33333ך@ܚ@fffff@@@33333@@fffff@@ @33333@@fffff@ @%@33333+@0@fffff6@<@A@33333G@L@fffffR@X@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t s !# ??Hv IOFev_l ^ pt@t@t@t@t@t@t@t@t@u@u@ u@0u@@u@Pu@`u@pu@u@u@u@u@u@u@u@u@v@v@ v@0v@@v@Pv@`v@pv@v@v@v@v@v@v@v@v@w@w@ w@0w@@w@Pw@`w@pw@w@w@w@w@w@w@w@w@x@x@ x@0x@@x@Px@`x@px@x@x@x@x@x@x@x@x@y@y@ y@0y@@y@Py@`y@py@y@y@y@y@y@y@y@y@z@z@ z@0z@@z@Pz@`z@pz@z@z@z@z@z@z@z@z@{@{@ {@0{@@{@P{@`{@p{@{@{@{@{@{@{@{@{@|@|@ |@0|@@|@P|@`|@p|@|@|@|@|@|@|@|@|@}@}@ }@0}@@}@P}@`}@p}@}@}@}@}@}@}@}@}@~@~@ ~@0~@@~@P~@`~@p~@~@~@~@~@~@~@~@~@@@ @0@@@P@`@p@@@@@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȁ@Ѐ@؀@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȁ@Ё@؁@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȃ@Ђ@؂@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȃ@Ѓ@؃@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȅ@Є@؄@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȅ@Ѕ@؅@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȇ@І@؆@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȇ@Ї@؇@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@Ȉ@Ј@؈@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@@@@@@@ȉ@Љ@؉@@@@@@@@@ @(@0@8@@@H@P@X@`@h@p@x@@@@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t s !a# ??S IOFev_rIOF ^ JY8ֵ?<,??6;Nё?@8EGr@ޓZS@M Oo@T @n4@@46<}@ cZB!@qh @( @ cZ&@u*@|Pk'@@ak'@Ciq*)@gj+&@Έ @ǘV@Q@ͪ@~jt@PjM @j+@x@^)Ǻ? F%u@Bfj@ h"l?MbX9?|г @ r?jM?W2q@HPs?>٬ @[ A##@L@&@镲L&@bٽ @/L &$@ h"lx.@e @zG @Q|1@X@V@:Mm"@ q@ 0 @ǘp0@ cZ@e)@oTC@Cl?@/' @-A@DioK@ioC@pΈ?46W?"~j? ?6[ ?' ?Bi?7[ A?$?U0*? F%u? Ac]?? cZB>?_vO?s?镲?46٬\?/n?hs?HP?Qkw?y):??W[?????=,Ԛ?QI&?u?X9v?#?~jt?_)Ǻ?T??H}?lxz,C?6W?D?_vO?b2U0*?&S?&1?ZB>?DJ?٬W@mV}X@}гYX@48X@_LX@46X@J +X@1X@ X@%CX@,eXX@ZdX@l gX@ZdX@z6>WX@sAX@z,CX@-CX@J +X@sX@w-!X@V/X@@aX@Tt$X@Y8X@Nё\X@EGrQX@vV@ꕲ qQ@#J{/7@Cl? o_N@H}@kw#?ꕲ q?$?1%? h"?6[ ?ZB>?.!u? $(~@@߾@-C6@D?Ǻ?:H?%u?"~j?KY8?m{?{P?d`T? yǹ?c]K?I +?&S?*Ǻ?~:p?Έ ?Bfj?8m4?47?c]F?ea?q?KY8?:M?_L?uV?x&1?>yX5?Y8m? ?†W2?{Pk?Zd;O??[W @Ciq@Ciq?Q|a@:@pΈޠ@X @~jtS%@c]K)@ׁs,@`vO.@2w-!t/@ŏ1w-.@7A`,@Bi)@a+E&@Y~"@ r(@(@@p= ף@ΪVl@fffff @/L $@&䃞j(@?+@ -.@S:A0@^)0@ q+0@z6k.@&s+@m4'@C#@"~j@sA@PnC@*:@xz,C@[ A#@N@ac#@:pΈR(@xI-@2w-!0@ZӼ2@N@3@ r4@j+g4@W[3@<,2@h|?/@Qe*@u~$@}b@n@9#J@oŏ1??n @Af@Bf!@}гY(@7d/@_L 3@^K=5@b2U0*7@\m9@x&a:@n:@c]K:@Ciq8@&C7@d`5@ S2@e.@镲 Q(@v"@W2@0' 5@ʡE@/$?I +?0*?|a2U@J4 @䃞ͪO@,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t,t s !a?? LZHev_rLZH ' (c@,@ N`:@9$@@ ,hH@@#@@N@ g@K@{@P@p@)@0\q@ Ya=@`;rj@Pj/b@~@pRc@`kթ@PA@`yڋ@*_jm@Χ~@ @0J|IN@(@оG@"GI@ (i@3B@`%-@,~@O@Y@`?Z@ 0@544@0-;,i@^2q@:@4lJh@ "/@XKw@rb3@"@88@@%@p]@ D2@r@@:@0,*=F@ x@lY.{@ C@0{@P+/ /@Uu@pK?X@{#6X@/KRX@tX@w-!tX@ z^X@ȁX@!@GX@% X@_s`^X@ RX@YW@]gF>O@HoI@@0B4@@,t?36?WQ?on?@Ab{?Xa$ @F[k@2@8Z@ B(Yc @@v@5 @ - @`|m@Р)C^@ %@-!@k-@@_*@ɹ^@05JMA@Nǭ,@@@LŘ@H.@M@btq@0K|@0H'p@W4@$~ @е:F@/]@rҠ E@D8@08`@`\@eX{@t @P? @1I@Z@eb@@f*#@0fp@0xN~@`#@t@@\J@@*@`-8(@1@Z@`d:@@@`XY6@߳@-nH@j t@@@Pso46@HP@mU@@Pֹ@mx0@! @`XZ@]ʯ@JR@t@R@PS @jNI@AZ@PYGY@@\ג@@夁@@y@@@Vt5ÿ@ R@jP@=6@vU@@M`@04@]FV#@pf@s@pq]@a@E@p$@@O%^@VwJ@@ @p>@pچV@pܣ@ww@9@bmV@`^|v@/@`,Jdz@P,d{@@ǹM@p.7@Py@ @L@@k@1:8@fz>@0ᣴu@qr@& u@~}@9)@>@ M ə@`ԝ@+@@=s @@* ۠@p@@‘@0)@!|@BM@(@P@C(@p0C@`+@`$@Ϡ@3X'@h@$@$@{z@``zV@ ;oc@ R%@Py[D@Pպ܌@AM@i~@0v@bs@` ~@ }@@HЩ}@Ѽ-@*@Yb {@`P @ RZ@@`:6@P@h[z@mq@ODi@,c@Ub@` e@Rj@?2€r@Б:y@p)~@pȳ~@|Lz@,r@ f@P\1Z@PթP@!'J@&I@@'SM@}DW@c@c q@a|@2݃@`yY@p8m@`ë|@&s@)j@zb@p֟i^@3?^@@ld@l@NOUw@ с@Q@_@py@ @=@u@024j@@_@X@&gU@=V@#Z@T`@0r>+h@ ]9 o@ fnt@C=w@Mw@''t@gFp@@Zl@UMug@0G?ud@P7w2b@1ib@Pc@fd@^}@^K@PMX@ѶPc@`P:m@|r@ts@;p@+¨g@0 \@_kM@}n=@ 3a-@c@l+ @ L @@{@?k~ @p.@+#@PV0@`U>@PJCK@qVV@@<^@ uc@Bc@q:a@j|[@1YyS@p"J@ 7}@@#7@AB/0@ |+@@(@=h,P)@0|[U,@P'2@6 9J9@ )6A@ I@pO@ (E,U@Ȇ"X@0|X@H4"V@P@PA@PC@m] C@@$B@R>@ j9@2@v$+@@z#@@0@C @@*@J.@@%@ m@%z@L|@`@` @0K@{@P7@U^@렷'@T.@ѕc5@,@;@H?@m "C@\ñD@j͠D@ oC@tx@@.<@yq6@`t0@y)@$A"@"@ 0@hD@@Vq< @`I@@u@^ P@ @|a@0#K@ ]}@0&t} @O@p4@9@v=@W#@&@pn@)@Ph*@p++@`'N*@](@]W%@VnX!@0YY@oM@P8@@h- @0@ZP@j%@ 5@,?@@@ `,@@2@`@~ g@}@)g9@+3@ ]?@p?k@PMI@<@h\@p;aӔ@`?"@PFh&@x#(@q*@Ԡ*@!*@GțW(@wՉ%@c> !@OK@Ȇ"@PQ@" @W@ 奬@ @4 @@wU@`2@@]Ќ@J<@[@@24CO@ iv@`A5q@`(@I47@.n@ @@@O@0BS @EeT @O$@ฝr@@i(@`O;5@ّ@8@g,@puw@৯B%@(J@L@U@Pjr@`='o @ :k @ڽ@w@T j@ @@O^@#c@A@7%@x2F@@q@@P@Ы@@O6@Wy] @k @0@@k@@鮑@p@֠@m@`W4@*Z@q:@@1@ZkA@@y@J2 @@}N @Bƕ@D@`9/@dw@`6 @e @;_@`@q }@`Z@ĝ@>G@@<w@J@\@`}@j>(@@|@Ʒ@@Z/@]@t@9@DXC@,j@gn@`!?@`<"@5@ 4@@c{-@Mo5@@@P.=@@p7֊@ 3@ 撪@`—@@PG@cQ"@`q@#K@}@`Q @e@e/@:b@Y32@ $l.@@=r_@hC*@bT@@@@/:4@@c_@} @y@ 2@)@oKS@ ʡ@@(2@a{wu@ @6@n@V@`lm@`X@@@@@T*@Mpv@i{@Cg>@<@ ^@&8P;@ =@%@P{@sv@Bֵ@@>@`ܲ@G@ 82F@MT@xU@`@`,@k5@ B@ U>@Q.@@l_p@#y@=@ V|P@[H@$@F%@b)@ @Pm@ @A@N X@3[@ E@@@@ż3@x@ @2=@y ښ@ =O@`=@@B@a6@|W@/x@S@X z@^D@P_@_(@Qtn@@k :!@@(w@@S@YT@ :@`e>@ zl@ kh@#@@H@M@j@=6@.\@ %@ӝ'@d@C@b@ "@vݖ@@g@K&@&@-,n@@@ @o@'@3@`n@@ߔ@@R@ @r(@)J=@͝@ @+}@}`"@>@ &@ p@h@{,}@ ٬X@ X@`7l[X@<DX@#gaO;X@7l[ٺX@gbW@ U@ ?x?#x/?X?Z1r?fg.?W;sT?[v?0 %?L?,T~?qR=>?d'rw ?)? d?';?s?viai`?"?#8?-|w?FtO?Ym_u?yB ? ]Q?h'?g%8?|ڥ @6ZP[?sv=?z1m?`?N@Cj@$W:uX@DQOX@ʦ\X@X@X@W2X@Z!X@6~X@U+X@`#d?)*@ևF @#@.ZlI?`Y!6?*@Qy9\@x'-\@eK@5ԃ '?:}ј?8ߡ@~#@K[@DR@ХI?,ڕ+?f;*?u_@h\W(@Iط3@-|?eX ?Mh-?w 4?j,aml@&k@ 7k@K-RQ?KU?qHX?eG? ?݁W?K%ZJ??} l?BMn?. 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