Naslov
GISAXS and AFM study of Germanium islands on silicon

Autori
Dubček, Pavo ; Kovačević, Ivana ; Radić, Nikola ; Zorc, Hrvoje ; Pivac, Branko ; Bernstorff, Sigrid ; Campione, A. ; Borghesi, A.

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
IVC-16 (16th International Vacuum Congress) ICSS-12 (12th INternational Conference on Solid Surfaces) NANO-8 (8th Int. Conference on Nanometer Scale Science and Technology) AIV-17 (17th Vacuum National Symposium) CD-ROM: Book 2 - Poster Sessions / Sancrotti, Massimo - Venecija : IUVSTA & Associazione Italiana del Vuoto, 2004

Skup
IVC-16 (16th International Vacuum Congress) ICSS-12 (12th INternational Conference on Solid Surfaces) NANO-8 (8th Int. Conference on Nanometer Scale Science and Technology) AIV-17 (17th Vacuum National Symposium)

Mjesto i datum
Venecija, Italija, 28.06.2004. - 02.07.2004

Vrsta sudjelovanja
Poster

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
Ge/Si; GISAXS; AFM

Sažetak
Germanium islands, were formed on (100) oriented single-crystal silicon sub-strates by subsequent annealing of the evaporated film, and by magnetron sputtering of Ge on the substrate held at elevated temperatures. The struc-tures formed by these processes have been studied by grazing incidence small angle X-ray scattering (GISAXS) and by atomic force microscopy (AFM). A series of samples, annealed isothermally for different periods of time have been prepared and the island growth dynamics has been studied. Particle like scattering is evident already in as prepared sample though imbedded in the dominant thin film signal. The annealing leads first to the film re-laxation and ordering, as evidenced by the enhancement of the fringes for the shorter annealing times. The prolonged annealing affects first the upper surface roughness, and finally leads to the full particles formation. The mor-phology of the particles was analyzed by AFM and compared to the results obtained by GISAXS analysis.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

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