Pregled bibliografske jedinice broj: 171065
On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films
On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films // Fizika A, 15 (2006), 1; 35-50 (podatak o recenziji nije dostupan, članak, znanstveni)
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Naslov
On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films
Autori
Djerdj, Igor ; Tonejc, Anđelka ; Tonejc, Antun ; Radić, Nikola
Izvornik
Fizika A (1330-0008) 15
(2006), 1;
35-50
Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni
Ključne riječi
Tungsten thin film; X-ray diffraction; Grain size and microstrain
Sažetak
Different methods of the X-ray diffraction line profile analysis (XRDLPA) are currently used to study microstructural parameters such as crystallite size (diffracted domain size), microstrain and texture in tungsten thin films deposited on glass by DC magnetron sputtering at different substrate temperatures and at different working-gas pressures. The whole-pattern analysis within the Rietveld method, the single-line method, "double Voigt" method (equivalent to the Warren-Averbach method) were used and mutually compared. In addition the results obtained by the Scherrer method were also discussed. The line broadening was found to be isotropic, supporting the reliability of usage of the Rietveld method in size-microstrain extraction.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
POVEZANOST RADA
Ustanove:
Institut "Ruđer Bošković", Zagreb,
Prirodoslovno-matematički fakultet, Zagreb
