Pregled bibliografske jedinice broj: 160190
Experimentally Verified Procedure for Determining Dynamical Model of the ETM MEMS Structures
Experimentally Verified Procedure for Determining Dynamical Model of the ETM MEMS Structures // Ninth Intersociety Conference on Thermal and Thermomechanical Phenomena 2004. ITHERM 2004
Las Vegas (NV), Sjedinjene Američke Države, 2004. str. 541-548 Vol. 2 (predavanje, međunarodna recenzija, cjeloviti rad (in extenso), znanstveni)
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Naslov
Experimentally Verified Procedure for Determining Dynamical Model of the ETM MEMS Structures
Autori
Borovic, Bruno ; Lewis, Frank L. ; Hossain, Mohammad M. ; Agonafer, Dereje ; Kolesar, Edward S.
Vrsta, podvrsta i kategorija rada
Radovi u zbornicima skupova, cjeloviti rad (in extenso), znanstveni
Izvornik
Ninth Intersociety Conference on Thermal and Thermomechanical Phenomena 2004. ITHERM 2004
/ - , 2004, 541-548 Vol. 2
Skup
Ninth Intersociety Conference on Thermal and Thermomechanical Phenomena 2004. ITHERM 2004
Mjesto i datum
Las Vegas (NV), Sjedinjene Američke Države, 01.06.2004. - 04.06.2004
Vrsta sudjelovanja
Predavanje
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
modeling procedure; MEMS thermo actuators; dynamical model; lumped parameters; thermal model; mechanical model; electrical model; multi-physics; FEA
Sažetak
Electro Thermo Mechanical (ETM) actuators play important role in MEMS area particularly as a part of the more complex MEMS assemblies. Compared with the other types of micro actuators, ETM actuators generate large force with the price of the high power consumption. Tradeoff between these two properties arises necessity for the development of its accurate dynamical mathematical model. The accurate model leads towards the optimal design and, if necessary, can be used for a subsequent design of control algorithms. In general, the mathematical model consists of the three sub-models – electrical, thermal and mechanical and is should be considered as multi-physics phenomena with thermal one playing a dominant role. The dynamics of particular sub-model is determined by combining of the theoretical and Finite Element Analysis approach, verified with the available experimental data. Simultaneous application of these three approaches requires a definition of a procedure that leads toward determination of the model. In this paper, mentioned procedure is described in details, and is subsequently illustrated on the example of two hot arm bimorph thermal actuator fabricated using Poly - Multi User MEMS Process (PolyMUMPs).
Izvorni jezik
Engleski
Znanstvena područja
Elektrotehnika
