Pregled bibliografske jedinice broj: 154290
Estimation of amorphous silicon thin films density by optical methods
Estimation of amorphous silicon thin films density by optical methods // Program and Book of Abstracts of 10th Joint Vacuum conference / Mozetič, M. ; Šetina, J. ; Kovač, J. (ur.).
Ljubljana: Infokart, 2004. str. 74-74 (poster, međunarodna recenzija, sažetak, znanstveni)
CROSBI ID: 154290 Za ispravke kontaktirajte CROSBI podršku putem web obrasca
Naslov
Estimation of amorphous silicon thin films density by optical methods
Autori
Gracin, Davor ; Juraić, Krunoslav
Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni
Izvornik
Program and Book of Abstracts of 10th Joint Vacuum conference
/ Mozetič, M. ; Šetina, J. ; Kovač, J. - Ljubljana : Infokart, 2004, 74-74
Skup
10th Joint Vacuum Conference
Mjesto i datum
Portorož, Slovenija, 2004
Vrsta sudjelovanja
Poster
Vrsta recenzije
Međunarodna recenzija
Ključne riječi
amorfni hidrirani silicij; gustoća; aproksimacija efektivnog medija; infra crvena spektroskopija
(amorphous hydrogenated silicon; density; efective medium approximation; ifra red spectroscopy)
Sažetak
Due to leak of long range ordering, density of amorphous silicon is lower than in its crystalline form. By hydrogenation of material, the density difference becomes larger. In order to study the effect qualitatively, the series of thin amorphous hydrogenated silicon films with large variation in hydrogen to silicon ratio, deposited by magnetron sputtering, was examined by UV-visible-IR spectroscopy and nuclear methods. The film density of deposited films was estimated by using tree different approaches. In the first one, the density was estimated by using EMA (Effective Medium Approximation) analysis of long wavelength dielectric function. In particularly, the basic and modified Bruggeman and Maxwell-Garnett models were tested. The second set of values for density was obtained by analysis of stretching vibrations of Si-H bonds in IR part of spectrum, by using earlier published method. These results were compared with the results obtained by nuclear methods, allowing the discussion of compatibility and accuracy of all of applied methods. The final result, density variation in a-Si:H samples deposited by magnetron sputtering as a function of hydrogen to silicon ratio, was compared with results of density measurements made on the samples deposited by other techniques. The qualitative and quantitative matching allows some concluding remarks upon intrinsic structural property of amorphous Si:H material.
Izvorni jezik
Engleski
Znanstvena područja
Fizika
